Patents by Inventor Ruenn-Sheng Peng

Ruenn-Sheng Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fuzzy reasoning model for semiconductor process fault detection using wafer acceptance test data
    Patent number: 7035770
    Abstract: System and method for detecting suspicious process faults. A preferred embodiment comprises determining a strength relationship between wafer acceptance test (WAT) parameters and process steps. The strength relationships indicate the affect of a failed process step on the value of a WAT parameter. Thus, if a WAT parameter is not within the parameters set in the WAT, then the suspicious process steps that caused the failure are the process steps that had a strength relationship with the failed WAT parameter. Furthermore, in a preferred embodiment, negative inferences are determined and utilized to determine a degree of suspiciousness. The degree of suspiciousness is used to determine a total degree of suspiciousness.
    Type: Grant
    Filed: December 18, 2003
    Date of Patent: April 25, 2006
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shuo-Huei Lin, Ruenn-Sheng Peng, Yi-Ju Chen, Kuo-Rung Hsiao
  • Fuzzy reasoning model for semiconductor process fault detection using wafer acceptance test data
    Publication number: 20050137736
    Abstract: System and method for detecting suspicious process faults. A preferred embodiment comprises determining a strength relationship between wafer acceptance test (WAT) parameters and process steps. The strength relationships indicate the affect of a failed process step on the value of a WAT parameter. Thus, if a WAT parameter is not within the parameters set in the WAT, then the suspicious process steps that caused the failure are the process steps that had a strength relationship with the failed WAT parameter. Furthermore, in a preferred embodiment, negative inferences are determined and utilized to determine a degree of suspiciousness. The degree of suspiciousness is used to determine a total degree of suspiciousness.
    Type: Application
    Filed: December 18, 2003
    Publication date: June 23, 2005
    Inventors: Shuo-Huei Lin, Ruenn-Sheng Peng, Yi-Ju Chen, K.R. Hsiao