Patents by Inventor Rui-Hui Wen

Rui-Hui Wen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070246065
    Abstract: An ion sampling method for wafer provides a wafer in a sampling chamber, wherein the wafer surface that is going to be sampled faces upward; spraying an extraction liquid continuously on the wafer surface to form a liquid film thereon; keeping the thickness of the film constant for dissolving the ion contaminants in the extraction liquid; and collecting the extract solution at the bottom of the sampling chamber.
    Type: Application
    Filed: June 27, 2007
    Publication date: October 25, 2007
    Applicant: POWERCHIP SEMICONDUCTOR CORP.
    Inventor: Rui-Hui Wen
  • Patent number: 7255114
    Abstract: An ion sampling method for wafer provides a wafer in a sampling chamber, wherein the wafer surface that is going to be sampled faces upward; spraying an extraction liquid continuously on the wafer surface to form a liquid film thereon; keeping the thickness of the film constant for dissolving the ion contaminants in the extraction liquid; and collecting the extract solution at the bottom of the sampling chamber.
    Type: Grant
    Filed: August 18, 2003
    Date of Patent: August 14, 2007
    Assignee: Powerchip Semiconductor Corp.
    Inventor: Rui-Hui Wen
  • Patent number: 6923188
    Abstract: A method of sampling contaminants of a semiconductor wafer carrier. The method includes placing a tool chamber in a clean room and then placing and fixing the semiconductor wafer carrier with its opening facing downward inside the tool chamber. Then the method includes using at least one nozzle to spray extraction fluid uniformly on the inner surfaces of the semiconductor wafer carrier and collecting the extraction fluid.
    Type: Grant
    Filed: April 29, 2003
    Date of Patent: August 2, 2005
    Assignee: Powerchip Semiconductor Corp.
    Inventors: Rui-Hui Wen, Huei-Ming Ting
  • Publication number: 20040216766
    Abstract: A method of sampling contaminants of a semiconductor wafer carrier. The method includes placing a tool chamber in a clean room and then placing and fixing the semiconductor wafer carrier with its opening facing downward inside the tool chamber. Then the method includes using at least one nozzle to spray extraction fluid uniformly on the inner surfaces of the semiconductor wafer carrier and collecting the extraction fluid.
    Type: Application
    Filed: April 29, 2003
    Publication date: November 4, 2004
    Inventors: Rui-Hui Wen, Huei-Ming Ting
  • Publication number: 20040191140
    Abstract: An ion sampling method for wafer provides a wafer in a sampling chamber, wherein the wafer surface that is going to be sampled faces upward; spraying an extraction liquid continuously on the wafer surface to form a liquid film thereon; keeping the thickness of the film constant for dissolving the ion contaminants in the extraction liquid; and collecting the extract solution at the bottom of the sampling chamber.
    Type: Application
    Filed: August 18, 2003
    Publication date: September 30, 2004
    Inventor: Rui-Hui Wen