Abstract: The present disclosure provides a control method for a rectification and purification system of electronic-grade chlorine trifluoride. A rectification device of electronic-grade chlorine trifluoride includes a two-stage cryogenic rectification device including a low-boiling column and a high-boiling column. An extraction agent is arranged in the two-stage cryogenic rectification device for further dissociating associated molecules of hydrogen fluoride and chlorine trifluoride to meet the requirements of electronic-grade chlorine trifluoride. The reflux ratio parameter stability of a vapor-liquid (chlorine trifluoride-hydrogen fluoride) phase equilibrium system can be effectively improved by a column plate temperature control method, thus realizing wide dynamic smooth running under various working conditions.

Abstract: The present disclosure provides a control method for a rectification and purification system of electronic-grade chlorine trifluoride. A rectification device of electronic-grade chlorine trifluoride includes a two-stage cryogenic rectification device including a low-boiling column and a high-boiling column. An extraction agent is arranged in the two-stage cryogenic rectification device for further dissociating associated molecules of hydrogen fluoride and chlorine trifluoride to meet the requirements of electronic-grade chlorine trifluoride. The reflux ratio parameter stability of a vapor-liquid (chlorine trifluoride-hydrogen fluoride) phase equilibrium system can be effectively improved by a column plate temperature control method, thus realizing wide dynamic smooth running under various working conditions.