Patents by Inventor Rui KANEMURA
Rui KANEMURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240136198Abstract: A substrate-processing method includes a) providing a substrate including a silicon oxide film on a surface of the substrate, b) supplying a gas mixture to the surface of the substrate, thereby etching the silicon oxide film, the gas mixture including fluorine-containing gas and basic gas, c) purging the surface of the substrate, and d) alternatingly repeating b) and c).Type: ApplicationFiled: October 5, 2023Publication date: April 25, 2024Inventor: Rui KANEMURA
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Patent number: 11807938Abstract: An exhaust device includes: a first pressure regulator provided in an exhaust pipe connected to a processing container; a second pressure regulator provided on a downstream side of the first pressure regulator; a first vacuum gauge provided on an upstream side of the first pressure regulator; and a second vacuum gauge provided between the first pressure regulator and the second pressure regulator.Type: GrantFiled: January 29, 2020Date of Patent: November 7, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Yutaka Motoyama, Rui Kanemura
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Patent number: 11658028Abstract: A film forming method for forming a silicon film having a step coverage on a substrate having a recess in a surface of the substrate, the film forming method comprising: forming a silicon film such that a film thickness on an upper portion of a side wall of the recess is thicker than a film thickness on a lower portion of the side wall of the recess by supplying a silicon-containing gas to the substrate; and etching a portion of the silicon film conformally by supplying an etching gas to the substrate, wherein the act of forming the silicon film and the act of etching the portion of the silicon film are performed a number of times which is determined depending on the step coverage.Type: GrantFiled: August 13, 2019Date of Patent: May 23, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Rui Kanemura, Hiroyuki Hayashi
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Patent number: 11251034Abstract: There is provided a film forming method comprising an organic substance removal step of removing an organic substance adhering to an oxide film generated on a surface of a base by supplying a hydrogen-containing gas and an oxygen-containing gas to the base; an oxide film removal step of removing the oxide film formed on the surface of the base after the organic substance removal step; and a film forming step of forming a predetermined film on the surface of the base after the oxide film removal step.Type: GrantFiled: February 21, 2019Date of Patent: February 15, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Hiroyuki Hayashi, Rui Kanemura, Satoshi Takagi, Mitsuhiro Okada
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Patent number: 11114297Abstract: According to one embodiment of the present disclosure, a method for forming a crystallized semiconductor film having a specific grain size on a substrate includes: forming a seed layer on the substrate accommodated in a processing container; vacuuming an interior of the processing container to a medium vacuum or less in a state in which the substrate, on which the seed layer is formed, is accommodated in the processing container; forming an amorphous semiconductor film on the seed layer after vacuuming the interior of the processing container; and crystallizing the amorphous semiconductor film by heat processing.Type: GrantFiled: November 25, 2019Date of Patent: September 7, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Rui Kanemura, Keita Kumagai, Keisuke Fujita
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Patent number: 11101131Abstract: A method of selectively forming a silicon film on an upper portion of each of protruded portions formed on a substrate, which includes: supplying a first silicon-containing gas to the substrate and forming a first silicon film so that a film thickness of the first silicon film becomes thicker in the upper portion rather than in a lower portion of a sidewall of each protruded portion; subsequently, supplying an etching gas to the substrate and removing the first silicon film on the sidewall of each protruded portion while leaving the first silicon film on an upper surface of each protruded portion; and subsequently, supplying a second silicon-containing gas to the substrate and forming a second silicon film so that a film thickness of the second silicon film becomes thicker in the upper portion rather than in the lower portion of a sidewall of each protruded portion.Type: GrantFiled: August 14, 2019Date of Patent: August 24, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Rui Kanemura, Hiroyuki Hayashi
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Publication number: 20200312677Abstract: A substrate processing apparatus includes a processing container configured to accommodate a plurality of substrates therein, a gas supply configured to supply a first raw material gas of a compound containing Si or Ge and H and a second raw material gas of a compound containing Si or Ge and a halogen element into the processing container; and an exhauster configured to evacuate an inside of the processing container, wherein the gas supply has a dispersion nozzle provided with a plurality of gas holes for discharging the first raw material gas and the second raw material gas, and the substrate processing apparatus further comprises a heater configured to heat the first raw material gas and the second raw material gas in the dispersion nozzle.Type: ApplicationFiled: March 17, 2020Publication date: October 1, 2020Applicant: TOKYO ELECTRON LIMITEDInventors: Yoshihiro TAKEZAWA, Keita KUMAGAI, Keisuke FUJITA, Hiroyuki HAYASHI, Daisuke Suzuki, Rui KANEMURA, Sena FUJITA
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Publication number: 20200308696Abstract: There is provided a film forming method including: supplying a halogen-free silicon raw material gas into a processing container that accommodates a substrate therein in a halogen-free silicon raw material gas supply process; supplying a halogen-containing silicon raw material gas into the processing container in a halogen-containing silicon raw material gas supply process; removing the halogen-containing silicon raw material gas inside the processing container in a halogen-containing silicon raw material gas removal process; and repeating a cycle including a sequence of the halogen-free silicon raw material gas supply process, the halogen-containing silicon raw material gas supply process, and the halogen-containing silicon raw material gas removal process in a continuous manner.Type: ApplicationFiled: April 1, 2020Publication date: October 1, 2020Inventors: Rui KANEMURA, Yoshihiro TAKEZAWA, Keita KUMAGAI, Keisuke FUJITA
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Publication number: 20200248305Abstract: An exhaust device includes: a first pressure regulator provided in an exhaust pipe connected to a processing container; a second pressure regulator provided on a downstream side of the first pressure regulator; a first vacuum gauge provided on an upstream side of the first pressure regulator; and a second vacuum gauge provided between the first pressure regulator and the second pressure regulator.Type: ApplicationFiled: January 29, 2020Publication date: August 6, 2020Inventors: Yutaka Motoyama, Rui Kanemura
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Publication number: 20200168455Abstract: According to one embodiment of the present disclosure, a method for forming a crystallized semiconductor film having a specific grain size on a substrate includes: forming a seed layer on the substrate accommodated in a processing container; vacuuming an interior of the processing container to a medium vacuum or less in a state in which the substrate, on which the seed layer is formed, is accommodated in the processing container; forming an amorphous semiconductor film on the seed layer after vacuuming the interior of the processing container; and crystallizing the amorphous semiconductor film by heat processing.Type: ApplicationFiled: November 25, 2019Publication date: May 28, 2020Inventors: Rui KANEMURA, Keita KUMAGAI, Keisuke FUJITA
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Publication number: 20200058499Abstract: A film forming method for forming a silicon film having a step coverage on a substrate having a recess in a surface of the substrate, the film forming method comprising: forming a silicon film such that a film thickness on an upper portion of a side wall of the recess is thicker than a film thickness on a lower portion of the side wall of the recess by supplying a silicon-containing gas to the substrate; and etching a portion of the silicon film conformally by supplying an etching gas to the substrate, wherein the act of forming the silicon film and the act of etching the portion of the silicon film are performed a number of times which is determined depending on the step coverage.Type: ApplicationFiled: August 13, 2019Publication date: February 20, 2020Inventors: Rui KANEMURA, Hiroyuki HAYASHI
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Publication number: 20200058504Abstract: A method of selectively forming a silicon film on an upper portion of each of protruded portions formed on a substrate, which includes: supplying a first silicon-containing gas to the substrate and forming a first silicon film so that a film thickness of the first silicon film becomes thicker in the upper portion rather than in a lower portion of a sidewall of each protruded portion; subsequently, supplying an etching gas to the substrate and removing the first silicon film on the sidewall of each protruded portion while leaving the first silicon film on an upper surface of each protruded portion; and subsequently, supplying a second silicon-containing gas to the substrate and forming a second silicon film so that a film thickness of the second silicon film becomes thicker in the upper portion rather than in the lower portion of a sidewall of each protruded portion.Type: ApplicationFiled: August 14, 2019Publication date: February 20, 2020Inventors: Rui KANEMURA, Hiroyuki HAYASHI
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Publication number: 20190259599Abstract: There is provided a film forming method comprising an organic substance removal step of removing an organic substance adhering to an oxide film generated on a surface of a base by supplying a hydrogen-containing gas and an oxygen-containing gas to the base; an oxide film removal step of removing the oxide film formed on the surface of the base after the organic substance removal step; and a film forming step of forming a predetermined film on the surface of the base after the oxide film removal step.Type: ApplicationFiled: February 21, 2019Publication date: August 22, 2019Inventors: Hiroyuki HAYASHI, Rui KANEMURA, Satoshi TAKAGI, Mitsuhiro OKADA