Patents by Inventor Rui-Ping Chuang

Rui-Ping Chuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for transporting wafers between wafer holders and chambers
    Patent number: 9997384
    Abstract: An apparatus comprises a process chamber, and a loadlock connected to the process chamber. The loadlock is configured to have a wafer holder disposed therein. The wafer holder is configured to store a plurality of wafers, and is configured to transport the plurality of wafers away from the loadlock.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: June 12, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shao-Yen Ku, Ming-Jung Chen, Tzu Yang Chung, Chi-Yun Tseng, Rui-Ping Chuang