Patents by Inventor Ruiying ZHOU

Ruiying ZHOU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas sensor, sensor array, and manufacturing method thereof
    Patent number: 10801981
    Abstract: A gas sensor includes a silicon substrate, a detecting electrode, a first isolation film, a heating resistor, and a second isolation film that are successively stacked. The gas sensor has a base structure and a cantilever structure with a curled free end, and a gas sensitive material is provided on the end of the cantilever structure. A sensor array composed of the gas sensor, and a method for manufacturing the gas sensor are also provided. The method includes (1) selecting a sacrificial layer; (2) preparing a detecting electrode; (3) preparing a first isolation film; (4) preparing a heating resistor; (5) preparing a second isolation film; (6) releasing the membrane; and (7) loading the gas sensitive material.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: October 13, 2020
    Assignee: HEFEI MICRO NANO SENSING TECHNOLOGY CO., LTD.
    Inventors: Lei Xu, Shufeng Peng, Dongcheng Xie, Ruiying Zhou
  • GAS SENSOR, SENSOR ARRAY, AND MANUFACTURING METHOD THEREOF
    Publication number: 20200225180
    Abstract: A gas sensor includes a silicon substrate, a detecting electrode, a first isolation film, a heating resistor, and a second isolation film that are successively stacked. The gas sensor has a base structure and a cantilever structure with a curled free end, and a gassensitive material is provided on the end of the cantilever structure. A sensor array composed of the gas sensor, and a method for manufacturing the gas sensor are also provided. The method includes (1) selecting a sacrificial layer; (2) preparing a detecting electrode; (3) preparing a first isolation film; (4) preparing a heating resistor; (5) preparing a second isolation film; (6) releasing the membrane; and (7) loading the gas sensitive material.
    Type: Application
    Filed: December 12, 2018
    Publication date: July 16, 2020
    Applicant: HEFEI MICRO NANO SENSING TECHNOLOGY CO., LTD.
    Inventors: Lei XU, Shufeng PENG, Dongcheng XIE, Ruiying ZHOU