Patents by Inventor Rujian LI

Rujian LI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation amount adjustment device and method, ion implantation apparatus and determination method
    Patent number: 10734189
    Abstract: The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: August 4, 2020
    Assignees: CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Hao Jing, Dongwoo Kang, Yongyi Fu, Chenliang Liu, Rujian Li, Kang Luo
  • Bearing device and ion implantation device
    Patent number: 10598220
    Abstract: A bearing device and an ion implantation device are provided. The bearing device includes a bearing table configured to bear a substrate, and a plurality of supporting components configured to support the substrate, each supporting component is movably arranged on the bearing table, to support the substrate at an adjustable position.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: March 24, 2020
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Chenliang Liu, Donghua Jiang, Yongyi Fu, Chao Tan, Xuewei Wang, Rujian Li, Kang Luo, Yongzhou Ling, Yin Xie, Jianbo Yang, Fei Li
  • Excimer laser generator and excimer laser annealing equipment
    Patent number: 10312655
    Abstract: An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: June 4, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Yin Xie, Zubin Lv, Yu Zhang, Yongzhou Ling, Yayu Wang, Jingshuai Wang, Chenliang Liu, Rujian Li, Kang Luo
  • ION IMPLANTATION AMOUNT ADJUSTMENT DEVICE AND METHOD, ION IMPLANTATION APPARATUS AND DETERMINATION METHOD
    Publication number: 20190164718
    Abstract: The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.
    Type: Application
    Filed: March 28, 2018
    Publication date: May 30, 2019
    Applicants: BOE TECHNOLOGY GROUP CO., LTD., CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Hao JING, Dongwoo KANG, Yongyi FU, Chenliang LIU, Rujian LI, Kang LUO
  • EXCIMER LASER GENERATOR AND EXCIMER LASER ANNEALING EQUIPMENT
    Publication number: 20180269643
    Abstract: An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.
    Type: Application
    Filed: December 14, 2017
    Publication date: September 20, 2018
    Inventors: Yin XIE, Zubin LV, Yu ZHANG, Yongzhou LING, Yayu WANG, Jingshuai WANG, Chenliang LIU, Rujian LI, Kang LUO
  • BEARING DEVICE AND ION IMPLANTATION DEVICE
    Publication number: 20180258988
    Abstract: A bearing device and an ion implantation device are provided. The bearing device includes a bearing table configured to bear a substrate, and a plurality of supporting components configured to support the substrate, each supporting component is movably arranged on the bearing table, to support the substrate at an adjustable position.
    Type: Application
    Filed: November 17, 2017
    Publication date: September 13, 2018
    Applicants: BOE TECHNOLOGY GROUP CO., LTD., CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Chenliang LIU, Donghua JIANG, Yongyi FU, Chao TAN, Xuewei WANG, Rujian LI, Kang LUO, Yongzhou LING, Yin XIE, Jianbo YANG, Fei LI