Patents by Inventor Russ Newman

Russ Newman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for optical detection of effluent composition
    Patent number: 6366346
    Abstract: A method and apparatus for determining the composition of an effluent stream from a vacuum processing chamber. A cell placed in the effluent stream from the vacuum processing chamber creates a glow discharge from the constituents in the effluent stream. An optical detector measures a particular wavelength corresponding to the presence of a particular species. In one embodiment the output from the optical detector is used to determine the endpoint of a chamber cleaning process.
    Type: Grant
    Filed: November 19, 1998
    Date of Patent: April 2, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Thomas Nowak, Sebastien Raoux, Dave Silvetti, Stefan Wolff, Russ Newman, Imad Yousif, Ned Matthew