Patents by Inventor Russel John Low

Russel John Low has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Terminal Structures Of An Ion Implanter Having Insulated Conductors With Dielectric Fins
    Publication number: 20090057572
    Abstract: Terminal structures of an ion implanter having insulated conductors with dielectric fins are disclosed. In one particular exemplary embodiment, the terminal structures of an ion implanter may be realized with insulated conductors with one or more dielectric fins. For example, the ion implanter may comprise an ion source configured to provide an ion beam. The ion implanter may also comprise a terminal structure defining a cavity, wherein the ion source may be at least partially disposed within the cavity. The ion implanter may further comprise an insulated conductor having at least one dielectric fin disposed proximate an exterior portion of the terminal structure to modify an electric field.
    Type: Application
    Filed: August 27, 2007
    Publication date: March 5, 2009
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Kasegn D. Tekletsadik, Eric Hermanson, Doug May, Steve Krause, Russel John Low