Abstract: Disclosed are apparatus and methods for monitoring an operation parameter of a process tool, independently of a process system recipe, are provided. In one embodiment, the behavior of a process device as it transitions between different states is monitored for a single cycle of operation or over time to detect trends that indicate a potential failure of the process device. When a trend that indicates a potential failure is detected, an alarm is generated. In one implementation, the time for reaching a particular stage of operation may be repeatedly monitored over a plurality of device cycles. For example, the time to open a valve or door may be monitored. In another example, the time for reaching a stable phase of gas flow after a ramping stage has commenced is monitored. When the time for reaching a particular stage begins to decline by a predetermined amount, an alarm may be generated.

Abstract: Disclosed are apparatus and methods for monitoring an operation parameter of a process tool, independently of a process system recipe, are provided. In general, an indirect effect that results from implementing an event from a process system recipe on the process system is monitored without using the specific values or setpoints that are entered for such event into the process system to thereby change a state of such process system. In one embodiment, the behavior of a process device as it transitions between different states is monitored for a single cycle of operation or over time to detect trends that indicate a potential failure of the process device. When a trend that indicates a potential failure is detected, an alarm is generated. In one implementation, the time for reaching a particular stage of operation may be repeatedly monitored over a plurality of device cycles. For example, the time to open a valve or door may be monitored.

Abstract: I would like to take this opportunity to describe my invention, of an addition that can be utilized on all paper, foam, plastic, disposable materials, plates and bowls. The way this invention operates, there is a single cartridge with a loaded plastic strip on the underside of the plate. The plastic strip has a flap to grasp, so that when you pull the flap the plastic unravels from the cartridge on the underside of the plate. It covers from one side of the plate to the other side of the plate (to seal the food in) and you wrap it underneath. This covers the plate of food for storage, for picnics, cook outs etc. It would use one cartridge per plate.