Abstract: A micro-opto-electro-mechanical system having a proof mass; at least one illumination source for providing illumination; an illumination detector; peripheral electronics; and an illumination mitigating mechanism for mitigating the effect of illumination emitted from the at least one illumination source on the peripheral electronics. According to various embodiments, the illumination mitigating mechanism includes handles disposed on the proof mass, an illumination collimating device, a substrate with a recess, a narrow beam light source, an illumination absorbing layer or optical limiters.

Abstract: A method for combining power of separate directed energy beams each associated with a separate firing unit, on a common spot on target. The firing units are coordination and synchronization unit (FUSU) tracks a target and assigns a master firing unit and slave firing units. The master firing unit sends a guide beam to the target, forming a local coordinate system on said target, while the slave firing units track the target and track at least one spot of EM (electromagnetic) radiation on the target. The slave units calculate a direction vector, and fire a power beam at the target, together with the master unit.