Patents by Inventor Ruud Antonius Beerens

Ruud Antonius Beerens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus having encoder type position sensor system
    Publication number: 20090002653
    Abstract: A lithographic apparatus is disclosed that includes an encoder type sensor system configured to measure a position of a substrate table of the lithographic apparatus relative to a reference structure. The encoder type sensor system includes an encoder sensor head and an encoder sensor target and the lithographic apparatus comprises a recess to accommodate the encoder sensor target.
    Type: Application
    Filed: May 23, 2008
    Publication date: January 1, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Eussen, Erik Roelof Loopstra, Engelbertus Antonius Van Der Pasch, Ruud Antonius Beerens, Albertus Adrianus Smits