Patents by Inventor Ryan Boas

Ryan Boas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for variable etch depths
    Patent number: 11456205
    Abstract: Methods of producing grating materials with variable height fins are provided. In one example, a method may include providing a mask layer atop a substrate, the mask layer including a first opening over a first processing area and a second opening over a second processing area. The method may further include etching the substrate to recess the first and second processing areas, forming a grating material over the substrate, and etching the grating material in the first and second processing areas to form a plurality of structures oriented at a non-zero angle with respect to a vertical extending from a top surface of the substrate.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: September 27, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Morgan Evans, Joseph C. Olson, Rutger Meyer Timmerman Thijssen, Daniel Distaso, Ryan Boas
  • METHODS FOR VARIABLE ETCH DEPTHS
    Publication number: 20210351069
    Abstract: Methods of producing grating materials with variable height fins are provided. In one example, a method may include providing a mask layer atop a substrate, the mask layer including a first opening over a first processing area and a second opening over a second processing area. The method may further include etching the substrate to recess the first and second processing areas, forming a grating material over the substrate, and etching the grating material in the first and second processing areas to form a plurality of structures oriented at a non-zero angle with respect to a vertical extending from a top surface of the substrate.
    Type: Application
    Filed: May 11, 2020
    Publication date: November 11, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Morgan Evans, Joseph C. Olson, Rutger Meyer Timmerman Thijssen, Daniel Distaso, Ryan Boas