Patents by Inventor Ryan L. Meyer
Ryan L. Meyer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12575120Abstract: Methods, apparatuses, and systems related to depositing a storage node material are described. An example method includes forming a semiconductor structure including a support structure having a first silicate material over a bottom nitride material, a first nitride material over the first silicate material, a second silicate material over the first nitride material, and a second nitride material over the second silicate material. The method further includes removing portions of the second nitride material. The method further includes depositing a third silicate material over the second nitride material and a portion of the second silicate material. The method further includes forming an opening through the semiconductor structure. The method further includes depositing a storage node material within the opening.Type: GrantFiled: April 22, 2022Date of Patent: March 10, 2026Assignee: Micron Technology, Inc.Inventors: Ryan L. Meyer, Vinay Nair, Andrea Gotti, Kevin Shea, Kyle R. Knori
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Publication number: 20240321727Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second pillars dummy are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.Type: ApplicationFiled: June 4, 2024Publication date: September 26, 2024Inventors: Vladimir Machkaoutsan, Pieter Blomme, Emilio Camerlenghi, Justin B. Dorhout, Jian Li, Ryan L. Meyer, Paolo Tessariol
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Publication number: 20230343815Abstract: Methods, apparatuses, and systems related to depositing a storage node material are described. An example method includes forming a semiconductor structure including a support structure having a first silicate material over a bottom nitride material, a first nitride material over the first silicate material, a second silicate material over the first nitride material, and a second nitride material over the second silicate material. The method further includes removing portions of the second nitride material. The method further includes depositing a third silicate material over the second nitride material and a portion of the second silicate material. The method further includes forming an opening through the semiconductor structure. The method further includes depositing a storage node material within the opening.Type: ApplicationFiled: April 22, 2022Publication date: October 26, 2023Inventors: Ryan L. Meyer, Vinay Nair, Andrea Gotti, Kevin Shea, Kyle R. Knori
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Patent number: 11792991Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The pillars are directly against conducting material of conductive lines in the conductive tiers. Other arrays, and methods, are disclosed.Type: GrantFiled: January 3, 2022Date of Patent: October 17, 2023Assignee: Micron Technology, Inc.Inventors: Paolo Tessariol, Justin B. Dorhout, Jian Li, Ryan L. Meyer
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Patent number: 11563011Abstract: A method used in forming integrated circuitry comprises forming conductive material over a substrate. The conductive material is patterned into a conductive line that is horizontally longitudinally elongated. The conductive material is vertically recessed in longitudinally-spaced first regions of the conductive line to form longitudinally-spaced conductive pillars that individually are in individual longitudinally-spaced second regions that longitudinally-alternate with the longitudinally-spaced first regions along the conductive line. The conductive pillars project vertically relative to the conductive material in the longitudinally-spaced and vertically-recessed first regions of the conductive line. Electronic components are formed directly above the conductive pillars. Individual of the electronic components are directly electrically coupled to individual of the conductive pillars. Additional methods, including structure independent of method, are disclosed.Type: GrantFiled: September 30, 2020Date of Patent: January 24, 2023Assignee: Micron Technology, Inc.Inventors: Vinay Nair, Silvia Borsari, Ryan L. Meyer, Russell A. Benson, Yi Fang Lee
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Publication number: 20220130857Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The pillars are directly against conducting material of conductive lines in the conductive tiers. Other arrays, and methods, are disclosed.Type: ApplicationFiled: January 3, 2022Publication date: April 28, 2022Applicant: Micron Technology, Inc.Inventors: Paolo Tessariol, Justin B. Dorhout, Jian Li, Ryan L. Meyer
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Publication number: 20220102348Abstract: A method used in forming integrated circuitry comprises forming conductive material over a substrate. The conductive material is patterned into a conductive line that is horizontally longitudinally elongated. The conductive material is vertically recessed in longitudinally-spaced first regions of the conductive line to form longitudinally-spaced conductive pillars that individually are in individual longitudinally-spaced second regions that longitudinally-alternate with the longitudinally-spaced first regions along the conductive line. The conductive pillars project vertically relative to the conductive material in the longitudinally-spaced and vertically-recessed first regions of the conductive line. Electronic components are formed directly above the conductive pillars. Individual of the electronic components are directly electrically coupled to individual of the conductive pillars. Additional methods, including structure independent of method, are disclosed.Type: ApplicationFiled: September 30, 2020Publication date: March 31, 2022Applicant: Micron Technology, Inc.Inventors: Vinay Nair, Silvia Borsari, Ryan L. Meyer, Russell A. Benson, Yi Fang Lee
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Patent number: 11244955Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The pillars are directly against conducting material of conductive lines in the conductive tiers. Other arrays, and methods, are disclosed.Type: GrantFiled: August 25, 2019Date of Patent: February 8, 2022Assignee: Micron Technology, Inc.Inventors: Paolo Tessariol, Justin B. Dorhout, Jian Li, Ryan L. Meyer
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Publication number: 20210343640Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second dummy pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.Type: ApplicationFiled: July 13, 2021Publication date: November 4, 2021Applicant: Micron Technology, Inc.Inventors: Vladimir Machkaoutsan, Pieter Blomme, Emilio Camerlenghi, Justin B. Dorhout, Jian Li, Ryan L. Meyer, Paolo Tessariol
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Patent number: 11094627Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second dummy pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.Type: GrantFiled: October 25, 2019Date of Patent: August 17, 2021Assignee: Micron Technology, Inc.Inventors: Vladimir Machkaoutsan, Pieter Blomme, Emilio Camerlenghi, Justin B. Dorhout, Jian Li, Ryan L. Meyer, Paolo Tessariol
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Publication number: 20210125919Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second dummy pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.Type: ApplicationFiled: October 25, 2019Publication date: April 29, 2021Applicant: Micron Technology, Inc.Inventors: Vladimir Machkaoutsan, Pieter Blomme, Emilio Camerlenghi, Justin B. Dorhout, Jian Li, Ryan L. Meyer, Paolo Tessariol
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Publication number: 20210057439Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Insulative pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The pillars are directly against conducting material of conductive lines in the conductive tiers. Other arrays, and methods, are disclosed.Type: ApplicationFiled: August 25, 2019Publication date: February 25, 2021Applicant: Micron Technology, Inc.Inventors: Paolo Tessariol, Justin B. Dorhout, Jian Li, Ryan L. Meyer