Abstract: An accelerometer device for reducing stress on the sensor resulting from temperature extremes and multiple coefficients of thermal expansion. An exemplary accelerometer device includes upper and lower stators and a reed. The reed includes a support ring and a paddle that is flexibly connected to the support ring. The support ring includes a ring section and at least two mounting devices. The mounting devices are at least partially mechanically isolated from the ring section. The ring section flexibly receives the paddle. The mounting devices include a pad area and a neck area that connect the pad area to the ring section. The neck area includes a width dimension that is narrower than a diameter dimension of the pad area.

Abstract: An accelerometer device for reducing stress on the sensor resulting from temperature extremes and multiple coefficients of thermal expansion. An exemplary accelerometer device includes upper and lower stators and a reed. The reed includes a support ring and a paddle that is flexibly connected to the support ring. The support ring includes a ring section and at least two mounting devices. The mounting devices are at least partially mechanically isolated from the ring section. The ring section flexibly receives the paddle. The mounting devices include a pad area and a neck area that connect the pad area to the ring section. The neck area includes a width dimension that is narrower than a diameter dimension of the pad area.

Abstract: An accelerometer device for reducing stress on the sensor resulting from temperature extremes and multiple coefficients of thermal expansion. An exemplary accelerometer device includes upper and lower stators and a reed. The reed includes a support ring and a paddle that is flexibly connected to the support ring. The support ring includes a ring section and at least two mounting devices. The mounting devices are at least partially mechanically isolated from the ring section. The ring section flexibly receives the paddle. The mounting devices include a pad area and a neck area that connect the pad area to the ring section. The neck area includes a width dimension that is narrower than a diameter dimension of the pad area.

Abstract: An accelerometer device for reducing stress on the sensor resulting from temperature extremes and multiple coefficients of thermal expansion. An exemplary accelerometer device includes upper and lower stators and a reed. The reed includes a support ring and a paddle that is flexibly connected to the support ring. The support ring includes a ring section and at least two mounting devices. The mounting devices are at least partially mechanically isolated from the ring section. The ring section flexibly receives the paddle. The mounting devices include a pad area and a neck area that connect the pad area to the ring section. The neck area includes a width dimension that is narrower than a diameter dimension of the pad area.

Abstract: Systems and methods for particle contaminant entrapment are provided. In one embodiment, a sensor device comprises a sensor mechanism; a structure having an internal cavity housing at least one passive element of the sensor mechanism; and a particle contaminant getter within the cavity.

Abstract: Two opposing substrate layers each having one or more recesses filled with magnetic material guide the flow of flux through a coil in a MEMS device layer to provide for closed-loop operation. Flux flows from one pole piece through the coil to a second pole piece. A method of making using lithographic etching techniques is also provided.

Abstract: A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device with precisely formed pole pieces to guide magnetic flux through a coil in a MEMS device layer. An example device includes a device layer, a magnetic return path component attached to a first side of the device layer, and a magnet unit attached to a second side of the device layer. The device layer includes a proof mass with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: Two opposing substrate layers each having one or more recesses filled with magnetic material guide the flow of flux through a coil in a MEMS device layer to provide for closed-loop operation. Flux flows from one pole piece through the coil to a second pole piece. A method of making using lithographic etching techniques is also provided.

Abstract: A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device with precisely formed pole pieces to guide magnetic flux through a coil in a MEMS device layer. An example device includes a device layer, a magnetic return path component attached to a first side of the device layer, and a magnet unit attached to a second side of the device layer. The device layer includes a proof mass with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: A proof mass for flexure type, magnetic and capacitance circuit accelerometer includes one or more standoff pads integrally formed on a fused silica paddle, such as being etched or patterned on the fused silica paddle. Further, the standoff pads have a thickness sufficient to locate at least a portion of one active coil in proximity to or even within a linear flux region of a magnetic circuit of the accelerometer. As such, the proof mass is configured to function with the magnetic circuit in a consistent and stable manner over a selected operational life of the accelerometer.

Abstract: The present invention provides an accelerometer which is more manufacturable, higher performance, and more survivable. This invention is particularly applicable for ultra-low-g sensors and ultra-high-g sensors.