Patents by Inventor Ryan S. Smith

Ryan S. Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10485111
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to via and skip via structures and methods of manufacture. The method includes: forming a first metallization layer with a first capping layer over the first metallization layer; forming a second metallization layer with a second capping layer over the second metallization layer; forming a partial skip via structure to the first metallization layer by removing a portion of the first capping layer and the second capping and depositing conductive material in an opening formed in the second metallization layer; forming a third capping layer over the filled partial skip via and the second capping layer; and forming a remaining portion of a skip via structure in alignment with the partial skip via structure by opening the third capping layer to expose the conductive material of the partial skip via.
    Type: Grant
    Filed: July 12, 2017
    Date of Patent: November 19, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Shao Beng Law, Nicholas V. LiCausi, Errol Todd Ryan, James McMahon, Ryan S. Smith, Xunyuan Zhang
  • Patent number: 10199261
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to dielectric repair for via and skip via structures and methods of manufacture. The method includes: etching a via structure in a dielectric layer; repairing sidewalls of the via structure with a repair agent; and extending the via structure with an additional etching into a lower dielectric layer to form a skip via structure exposing a metallization layer.
    Type: Grant
    Filed: July 19, 2017
    Date of Patent: February 5, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: James McMahon, Ryan S. Smith, Nicholas V. LiCausi, Errol Todd Ryan, Xunyuan Zhang, Shao Beng Law
  • Publication number: 20190027401
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to dielectric repair for via and skip via structures and methods of manufacture. The method includes: etching a via structure in a dielectric layer; repairing sidewalls of the via structure with a repair agent; and extending the via structure with an additional etching into a lower dielectric layer to form a skip via structure exposing a metallization layer.
    Type: Application
    Filed: July 19, 2017
    Publication date: January 24, 2019
    Inventors: James McMahon, Ryan S. Smith, Nicholas V. LiCausi, Errol Todd Ryan, Xunyuan Zhang, Shao Beng Law
  • Publication number: 20190021176
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to via and skip via structures and methods of manufacture. The method includes: forming a first metallization layer with a first capping layer over the first metallization layer; forming a second metallization layer with a second capping layer over the second metallization layer; forming a partial skip via structure to the first metallization layer by removing a portion of the first capping layer and the second capping and depositing conductive material in an opening formed in the second metallization layer; forming a third capping layer over the filled partial skip via and the second capping layer; and forming a remaining portion of a skip via structure in alignment with the partial skip via structure by opening the third capping layer to expose the conductive material of the partial skip via.
    Type: Application
    Filed: July 12, 2017
    Publication date: January 17, 2019
    Inventors: Shao Beng Law, Nicholas V. LiCausi, Errol Todd Ryan, James McMahon, Ryan S. Smith, Xunyuan Zhang
  • Patent number: 10109526
    Abstract: Structures for a skip via and methods of forming a skip via in an interconnect structure. A metallization level is formed that includes a dielectric layer with a top surface. An opening is formed that extends vertically from the top surface of the dielectric layer into the dielectric layer. A dielectric cap layer is deposited on a bottom surface of the opening. A fill layer is formed inside the opening and extends from the top surface of the dielectric layer to the dielectric cap layer on the bottom surface of the opening. A via opening is etched that extends vertically through the fill layer to the dielectric cap layer on the bottom surface of the opening.
    Type: Grant
    Filed: May 31, 2017
    Date of Patent: October 23, 2018
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Xunyuan Zhang, Nicholas V. LiCausi, J. Jay McMahon, Ryan S. Smith, Errol Todd Ryan, Shao Beng Law
  • Publication number: 20160301323
    Abstract: A configurable power converter includes an interchangeable face plate mounted to a chassis and circuit terminals mounted to the interchangeable face plate. Each of the circuit terminals are configurable as input circuit terminals or output circuit terminals. The power converter also includes a direct current bus within the chassis that includes a positive terminal and a negative terminal. The power converter also includes electrical switches electrically connected between the positive terminal and the negative terminal of the direct current bus. The power converter further includes a controller that operates the electrical switches to provide electrical power to the direct current bus from power received from the input circuit terminals and operates the electrical switches to provide power to the output circuit terminals from power of the direct current bus. The input circuit terminals and the output circuit terminals can each support alternating current power or direct current power.
    Type: Application
    Filed: April 8, 2016
    Publication date: October 13, 2016
    Inventors: Devin Dilley, Ryan S. Smith