Abstract: A lithography apparatus includes a cleaning unit configured to perform cleaning of a substrate holder, a detector configured to detect a foreign substance by observing a substrate held by the substrate holder, and a controller configured to control execution of a pattern forming operation on the substrate and a cleaning operation. The controller operates such that, if a foreign substance is detected out of a predetermined area including a position at which a foreign substance was previously detected after a predetermined number of executions of the cleaning operation, a next pattern forming operation is performed after executing the cleaning operation. Otherwise, a next pattern forming operation is performed without executing the cleaning operation.

Abstract: An element substrate of a liquid ejection head includes: a base material; an insulating film positioned on the base material; a heating resistance element for generating heat energy for ejecting a liquid; a protective film for covering the heating resistance element; a first electrical wiring layer arranged in the insulating film, for supplying a current to the heating resistance element; a second electrical wiring layer arranged on a layer different from the first electrical wiring layer in the insulating film, for supplying a current to the heating resistance element; and at least one connecting member extending into the insulating film to connect the first electrical wiring layer and the heating resistance element, for causing the current to flow in a first direction, the heating resistance element including a connecting region, extending in a second direction intersecting the first direction, to which the at least one connecting member is connected.

Abstract: If the shape of an element substrate is a parallelogram, a trapezoid, an uneven shape, or the like, there is no region where a driver transistor corresponding to a heater in the vicinity of an end portion of the element substrate is arranged, and thus the heater cannot be arranged near the end portion. The layout arrangement of driving circuits suitable for the substrate shape is required while suppressing an increase in the area of the element substrate. In an embodiment of this invention, the diffusion layer of the drain electrode of a driver transistor for driving a heater is divided in a direction perpendicular to that in which heaters are arranged, and the divided portions are connected to form one driver transistor. The divided portions are arranged stepwise.

Abstract: Data transfer is realized to support a high-speed and complex driving control of the driving element. A driving device includes a driving unit configured to supply a driving element with a pulse signal that determines a driving period to drive the driving element, an input unit configured to receive, in synchronization with a trigger signal, a data signal containing first information, second information, a first flag and a second flag that determine a waveform of the pulse signal, a first setting unit configured to set in the driving unit the first information that is input to the input unit, a retaining unit configured to read and retain the second information on the basis of the first flag, and a second setting unit configured to set in the driving unit the second information that is retained in the retaining unit on the basis of the second flag.

Abstract: A device includes a first element substrate and a second element substrate for driving a driving element; a first signal input unit connected to an input terminal of the first element substrate; a second signal input unit connected to an input terminal of the second element substrate; and a signal output unit. Each of the first and second element substrates includes a driving element, a first signal generation unit configured to output a first signal, a second signal generation unit configured to output a second signal, an input terminal, an output terminal, and a selection unit configured to receive a signal from the first and the second signal generation units, select one of a state of the first signal, a state of the second signal, and a high-impedance state on the basis of the selection signal input from the input terminal, and output the state to the output terminal.

Abstract: A liquid ejection head capable of more efficiently ejecting ink and an inkjet printing apparatus are provided. The liquid ejection head has a block member which surrounds at least a part of an effective bubble-generating region involved with heat generation in a heat-generating element and which is formed so as to protrude from the heat-generating element in a direction in which a liquid is ejected. The block member is arranged in a position where a distance of a position of an inner end part from an outer end part of the effective bubble-generating region is +2 ?m or less, with an outward direction being set to be positive.

Abstract: A liquid discharge head includes a first unit configured to supply power, and a second unit including an input unit to which the power is input, a plurality of heaters connected to the input unit via a common power source line and configured to discharge liquid, an energization unit configured to energize the plurality of heaters, and a selection unit configured to select a target heater from the heaters for discharging liquid to be energized in turn by the energization unit for a period corresponding to a time interval at which liquid is discharged, wherein the selection unit further selects non-target heaters from the heaters to be energized different from the heater targeted for use for discharging liquid before and after the target heater is energized.

Abstract: A lithography apparatus includes a cleaning unit configured to perform cleaning of a substrate holder, a detector configured to detect a foreign substance by observing a substrate held by the substrate holder, and a controller configured to control execution of a pattern forming operation on the substrate and a cleaning operation. The controller operates such that, if a foreign substance is detected out of a predetermined area including a position at which a foreign substance was previously detected after a predetermined number of executions of the cleaning operation, a next pattern forming operation is performed after executing the cleaning operation. Otherwise, a next pattern forming operation is performed without executing the cleaning operation.

Abstract: An embodiment of this invention relates to an element substrate that implements size reduction of the element substrate and simplification of the arrangement as well as a highly-reliable print operation, a printhead using the same, and a printing apparatus including the printhead. In the element substrate according to this embodiment, the slope of a ramp wave is changed to generate a plurality of pulses using one reference voltage. The slope of the ramp wave can be changed by changing the mirror ratio or the capacitance of a comparator as well as by changing the resistance of a DAC.

Abstract: A liquid ejection head substrate includes: a plurality of energy generating element arrays each including a plurality of energy generating elements configured to generate energy for ejecting liquid; a supply port array in which a plurality of supply ports configured to supply liquid to the plurality of energy generating elements are arranged between the plurality of energy generating element arrays in an arrangement direction in which the plurality of energy generating elements are arranged; a temperature detection element that is configured to detect a temperature of the liquid ejection head substrate and that is provided on one side of the supply port array; and a heating element that is configured to heat the liquid ejection head substrate and that is provided on the other side of the supply port array.

Abstract: A recent inkjet printing apparatus includes a large-capacitance capacitor to stabilize a heater power supply. The presence of this capacitor requires a long time to drop the heater voltage at the time of power shutdown or the like. For this reason, an unwanted heater current may flow during the drop. To solve this problem, in this embodiment, a high voltage logic circuit is provided near a printing element, and a terminal is provided so that a signal can directly be input to this circuit. Heater driving control is performed via the terminal. This makes it possible to reliably control the heater regardless of the logic power supply state even if the logic voltage abruptly drops at the time of power shutdown or the like.

Abstract: An embodiment of this invention relates to an element substrate that implements size reduction of the element substrate and simplification of the arrangement as well as a highly-reliable print operation, a printhead using the same, and a printing apparatus including the printhead. In the element substrate according to this embodiment, the slope of a ramp wave is changed to generate a plurality of pulses using one reference voltage. The slope of the ramp wave can be changed by changing the mirror ratio or the capacitance of a comparator as well as by changing the resistance of a DAC.

Abstract: A recent inkjet printing apparatus includes a large-capacitance capacitor to stabilize a heater power supply. The presence of this capacitor requires a long time to drop the heater voltage at the time of power shutdown or the like. For this reason, an unwanted heater current may flow during the drop. To solve this problem, in this embodiment, a high voltage logic circuit is provided near a printing element, and a terminal is provided so that a signal can directly be input to this circuit. Heater driving control is performed via the terminal. This makes it possible to reliably control the heater regardless of the logic power supply state even if the logic voltage abruptly drops at the time of power shutdown or the like.

Abstract: A liquid ejection head capable of more efficiently ejecting ink and an inkjet printing apparatus are provided. The liquid ejection head has a block member which surrounds at least a part of an effective bubble-generating region involved with heat generation in a heat-generating element and which is formed so as to protrude from the heat-generating element in a direction in which a liquid is ejected. The block member is arranged in a position where a distance of a position of an inner end part from an outer end part of the effective bubble-generating region is +2 ?m or less, with an outward direction being set to be positive.

Abstract: A print head is provided that well preserves ink characteristics upon printing by way of performing effective ink preliminary heating. The print head has heaters and ejection openings formed at locations corresponding to the heaters. Viewed from the side from which ink is ejected, a sub-heater is established in the print head between the ink supply port and the print elements so as to surround the ink supply port.

Abstract: This invention is directed to real time detection of occurrence of a transfer error and feedback of the detection result to a printing apparatus in consideration of a possible risk that a signal transfer error occurs on a transfer path that becomes longer as the printhead is elongated. To accomplish this, in a printhead configured by cascade-connecting a plurality of element substrates, information of a transfer error detected in real time in each element substrate during transfer of a print data signal is output to an element substrate on the next stage by taking account of information input from an element substrate on the preceding stage. Information containing pieces of information from all element substrates is output from an element substrate on the final stage.

Abstract: A liquid ejection head substrate includes: a plurality of energy generating element arrays each including a plurality of energy generating elements configured to generate energy for ejecting liquid; a supply port array in which a plurality of supply ports configured to supply liquid to the plurality of energy generating elements are arranged between the plurality of energy generating element arrays in an arrangement direction in which the plurality of energy generating elements are arranged; a temperature detection element that is configured to detect a temperature of the liquid ejection head substrate and that is provided on one side of the supply port array; and a heating element that is configured to heat the liquid ejection head substrate and that is provided on the other side of the supply port array.

Abstract: An inkjet recording head substrate having an electrothermal transducer for generating thermal energy used to discharge ink and a drive element for driving the electrothermal transducer mounted thereon includes a first circuit portion for outputting selection signals for selecting the electrothermal transducer to be driven at a amplitude level of a second voltage higher than a first voltage based on an input signal of the amplitude level of the first voltage, a second circuit portion for inputting the selection signals from the first circuit portion and controlling the drive element corresponding to the electrothermal transducer to be driven based on the selection signals subject to the second voltage, and a plurality of signal lines for transmitting the selection signals between the first and second circuit portions.

Abstract: A liquid discharge head includes a first unit configured to supply power, and a second unit including an input unit to which the power is input, a plurality of heaters connected to the input unit via a common power source line and configured to discharge liquid, an energization unit configured to energize the plurality of heaters, and a selection unit configured to select a target heater from the heaters for discharging liquid to be energized in turn by the energization unit for a period corresponding to a time interval at which liquid is discharged, wherein the selection unit further selects non-target heaters from the heaters to be energized different from the heater targeted for use for discharging liquid before and after the target heater is energized.

Abstract: Data transfer is realized to support a high-speed and complex driving control of the driving element. A driving device includes a driving unit configured to supply a driving element with a pulse signal that determines a driving period to drive the driving element, an input unit configured to receive, in synchronization with a trigger signal, a data signal containing first information, second information, a first flag and a second flag that determine a waveform of the pulse signal, a first setting unit configured to set in the driving unit the first information that is input to the input unit, a retaining unit configured to read and retain the second information on the basis of the first flag, and a second setting unit configured to set in the driving unit the second information that is retained in the retaining unit on the basis of the second flag.