Abstract: With respect to a charged particle beam apparatus, provided is a technology capable of preventing a deterioration in image quality of a captured image. The charged particle beam apparatus includes an imaging device that irradiates a sample with a charged particle beam and forms an image from information of the sample and a computer. The computer stores each of images (scanned images) obtained by scanning the same area multiple times, classifies each of images into an image including a deteriorated image and an image not including the deteriorated image, and stores a target image obtained by performing image integration from the image not including the deteriorated image. The charged particle beam apparatus includes a database that stores data such as information obtained from an imaging device including the scanned image, classification results, and the target image.

Abstract: An input and output device includes: an instruction analysis unit configured to generate a conversation document in which a conversation uttered by a user is converted into character string data and recognize, based on the conversation document, a conversation intention of the user including an instruction to an image acquisition device; a history retention unit configured to record, as history information, the conversation document, the conversation intention, and a response of the image acquisition device to the instruction to the image acquisition device; a difference analysis unit configured to divide a report creation period using a timing when the user issues, to the image acquisition device, an instruction including an intention to save a captured image as a boundary and output report creation information in which history information divided for each of the report creation periods, and a captured image and a differential condition corresponding to the history information are associated with each other;

Abstract: The invention provides a charged particle beam device that can accurately move a convergence point of a charged particle beam to a surface of a sample and facilitates a user to grasp a positional relation between the surface of the sample and the convergence point of the charged particle beam.

Abstract: A charged particle beam device 100 includes: an irradiation unit 110 configured to irradiate a sample S with a charged particle beam; a particle detection unit 130 configured to detect a particle caused by the irradiation of the sample with the charged particle beam; and a control unit 151 configured to generate an image of the sample based on an output from the particle detection unit, wherein the control unit 151 inputs the image of the sample S into models M1 and M2 for detecting a first structure 401 and a second structure 402, acquires a first detection result related to the first structure 401 and a second detection result related to the second structure 402 from the models M1 and M2, determines locations or regions of the first structure 401 and the second structure 402 based on the first detection result and the second detection result, and outputs an integration result image 203 representing the location or the region of the first structure 401 and the location or the region of the second structure 4

Abstract: A sample image display system 150 displays, on a screen, a plurality of images 203 of a sample S and a symbol 205 corresponding to each of the images. The sample image display system 150 displays each symbol 205 in a different mode according to information related to the corresponding image 203.

Abstract: A charged particle beam device 100 includes an irradiation unit 110 configured to irradiate a sample S with a charged particle beam, a detection unit 130 configured to output a signal caused by irradiating the sample S with the charged particle beam, a display unit 154 configured to output a condition selection interface for selecting one condition set from a plurality of condition sets, and a control unit 151 configured to execute an evaluation on an object of interest. The condition set includes information for specifying one learned model from a plurality of learned models, information for specifying one search condition from a plurality of search conditions including at least one of an irradiation condition and a detection condition, and information for specifying one analysis condition from a plurality of analysis conditions defining an operation of at least one of the irradiation unit 110 and the detection unit 130.

Abstract: With respect to a charged particle beam apparatus, provided is a technology capable of preventing a deterioration in image quality of a captured image. The charged particle beam apparatus includes an imaging device that irradiates a sample with a charged particle beam and forms an image from information of the sample and a computer. The computer stores each of images (scanned images) obtained by scanning the same area multiple times, classifies each of images into an image including a deteriorated image and an image not including the deteriorated image, and stores a target image obtained by performing image integration from the image not including the deteriorated image. The charged particle beam apparatus includes a database that stores data such as information obtained from an imaging device including the scanned image, classification results, and the target image.

Abstract: Provided is a sample observation apparatus including: a microscope that irradiates a sample with a probe, detects a signal from the sample, and outputs a detection signal; and a system that generates an image based on the detection signal received from the microscope. The system receives designation executed by a user for one or more trained models in a model database storing data of a plurality of trained models for estimating a high-quality image based on a low-quality image. The system generates and displays a current low-quality observation image based on the detection signal, and estimates and displays a high-quality image based on the current low-quality observation image according to each of the one or more trained models.

Abstract: An object of the present invention is to provide a charged particle beam device capable of easily and quickly calling a function required by a user on a GUI. A charged particle beam device according to the invention presents an operation component that is recommended to be provided on a component set according to an operation history of the charged particle beam device (see FIG. 5).

Abstract: The invention provides a charged particle beam device that can accurately move a convergence point of a charged particle beam to a surface of a sample and facilitates a user to grasp a positional relation between the surface of the sample and the convergence point of the charged particle beam.

Abstract: An object of the present invention is to provide a charged particle beam device capable of easily and quickly calling a function required by a user on a GUI. A charged particle beam device according to the invention presents an operation component that is recommended to be provided on a component set according to an operation history of the charged particle beam device (see FIG. 5).