Abstract: An inspection system inspects a flow of gas in a container storage facility that includes a placement table and a gas supply device to supply gas to the container. The inspection system includes: an inspection unit placeable on the placement table, and a determiner. The gas supply device includes: a gas supply section located in the placement table to be connectable to the container inflow section of the container; a gas supply pipe; and a supply gas flow rate controller to control a flow rate of the gas supplied to the gas supply section through the gas supply pipe, so as to be equal to a predetermined supply gas flow rate. The inspection unit includes: an inspection inflow section connectable to the gas supply section, and an inflow rate measurer to measure an inflow rate of the gas flowing thereto from the inspection inflow section.

Abstract: A die bonder comprises a storage unit which stores the image of the wafer taken by an imaging unit, a recognition pattern included the outline of a die formed on the wafer, and a recognition program, and a monitor-processing unit which gets the position on the wafer, of the die whose map data indicates normal, in the way that the die is matched with the recognition pattern by executing the recognition program, and that the center position of the die is gotten. Thus, the die bonder can recognize the position of the die without regard to the condition of dies on the wafer.