Abstract: An input device includes a fixed electrode, first and second movable electrodes, a first elastic member having a portion and being configured to deform so as to displace the portion of the first elastic member in accordance with a movement of the first movable electrode, a second elastic member having a portion and being configured to deform so as to displace the portion of the second elastic member in accordance with a movement of the second movable electrode, and a terminal configured to output a signal corresponding to a change in a capacitance between the first and second movable electrodes. The input device is responsible to various manipulations while not preventing a click feeling from being generated.

Abstract: In one exemplary embodiment, there is provided an etching method. The method includes (a) preparing a substrate, the substrate comprising a silicon-containing film and a mask, the silicon-containing film including a recess, the mask being provided on the silicon-containing film and including an opening that exposes the recess; (b) forming a carbon-containing film on a side wall of the silicon-containing film, the side wall defining the recess; and (c) by using a plasma generated from a processing gas, forming a protective film containing tungsten on the carbon-containing film and etching the silicon-containing film in the recess, the processing gas including a fluorine-containing gas and a tungsten-containing gas.

Abstract: A lubricant solid contains, in a content of 92 mass % or more and 100 mass % or less, a lubricant having a polygonal network bond structure.

Abstract: A method of producing a resin modifier, the method comprising a process of polymerizing an ethylene unsaturated monomer in the presence of a cellulose nanofiber, the cellulose nanofiber being reacted with an amine or a quaternary ammonium salt compound.

Abstract: The purpose of the present invention is to provide a learning model, a signal processor, a flying object, and a program that enable appropriate observation of the situation of an observed object or the environment around the observed object. The learning model is learned by using teaching data with a first received signal as input, the first received signal being based on a reflected electromagnetic wave that is an electromagnetic wave emitted to a first target area and then reflected, and with first meta-information as output, the first meta-information corresponding to the first received signal and having a predetermined item, so as to input a second received signal based on a reflected electromagnetic wave that is an electromagnetic wave emitted to a second target area and then reflected, and to output second meta-information corresponding to the second received signal and having a predetermined item.

Abstract: Provided are a defect removal device and a defect removal method capable of removing defects of a semiconductor substrate with high accuracy, and a pattern forming method and a method of manufacturing an electronic device using the semiconductor substrate from which defects on a surface are removed.

Abstract: Provided are an analysis apparatus and an analysis method capable of analyzing a smaller defect on a surface of a semiconductor substrate. An analysis apparatus includes a surface defect measurement unit that measures presence or absence of a defect on a surface of a semiconductor substrate, and obtains positional information on the surface of the semiconductor substrate for the defect on the surface of the semiconductor substrate, and an analysis section that performs inductively coupled plasma mass spectrometry by irradiating the defect on the surface of the semiconductor substrate with laser light based on the positional information of the defect on the surface of the semiconductor substrate, and collecting an analysis sample obtained by the irradiation using a carrier gas.

Abstract: A displacement measurement device includes: an irradiation unit that irradiates a measurement object with coherent light; a luminance-change coordinate point detection unit that detects a luminance-change coordinate point where a luminance change has occurred, based on light reflected from the measurement object, and outputs data related to the luminance-change coordinate point; and circuitry that calculates an amount of displacement of the measurement object, based on the data related to the luminance-change coordinate point, by performing computations of a first numerical sequence and a second numerical sequence. The first numerical sequence includes a set of first elements each representing a location of the luminance-change coordinate point extracted from the data. The second numerical-sequence includes a set of second elements each representing a location of the luminance-change coordinate point extracted from the data.

Abstract: An information processing system includes: circuitry that acquires, from a terminal device used by each of a plurality of users, user meeting information indicating a state of a corresponding one of the plurality of users in a meeting in which the plurality of users participate; acquire work information related to a history of work-related activities of the plurality of users; calculate a relationship index indicating a relationship between the plurality of users based on the acquired user meeting information and the acquired work information, and store the relationship index in a memory; and generate, based on the relationship index that is stored, presentation information for presenting the relationship index to each of the plurality of users, and cause the terminal device to present the presentation information.

Abstract: Provided are a method of manufacturing a semiconductor device in which the purity of a chemical liquid containing an organic solvent is more easily managed, a method of washing a semiconductor manufacturing apparatus, and a simpler method of measuring the cleanliness of a washing solution. A method of manufacturing a semiconductor device has Step 1 of bringing an oscillator into contact with a chemical liquid containing an organic solvent as a main component to obtain the amount of change in the resonance frequency of the oscillator resulting from the contact with the chemical liquid, Step 2 of confirming whether or not the amount of change in the resonance frequency of the chemical liquid falls within a permissible range of the amount of change in the resonance frequency based on the preset purity of the chemical liquid, and Step 3 of using the chemical liquid confirmed in Step 2 in manufacturing a semiconductor device.

Abstract: An object is to provide a biological signal processing device capable of evaluating the reliability of the measurement state of a biological signal, based on RRI information. A biological signal processing device includes: an RRI information acquisition means for acquiring RRI information composed of RRIs, of a biological signal measured by a sensor, arranged in time series, from the sensor; a map generation means for plotting points whose positions are determined based on values of the RRIs constituting the RRI information, on a feature space, and generating a map from the feature space; an index calculation means for calculating an index indicating resemblance to heart rate variability of each RRI constituting RRI information to be evaluated; and a reliability calculation means for calculating RRI reliability of each RRI constituting the RRI information, from the index.

Abstract: Provided are a method for inspecting a chemical solution, the method being able to analyze minute foreign matter in the chemical solution, a method for producing a chemical solution, a method for controlling a chemical solution, a method for producing a semiconductor device, a method for inspecting a resist composition, the method being able to analyze minute foreign matter in the resist composition, a method for producing a resist composition, a method for controlling a resist composition, and a method for checking a contamination status of a semiconductor manufacturing apparatus, the method being able to control minute foreign matter in the semiconductor manufacturing apparatus.

Abstract: A radar device includes an oscillator that generates a transmission signal including a plurality of chirp signals, the chirp signal having a frequency that increases or decreases from an initial frequency in each predetermined sweep cycle. The oscillator changes the initial frequency of each chirp signal. A transmitter emits the transmission signal, and a receiver receives a reflected wave of the transmission signal reflected at an object and an unwanted wave as a reception signal. Circuitry is configured to estimate a phase of the reception signal from the transmission signal and the reception signal, calculate a correlation between a change pattern of the initial frequency of each chirp signal and a change pattern of the phase of the reception signal, estimate the reflected wave from the reception signal based on the correlation, and calculate a number of incoming waves based on a result of the estimation of the reflected wave.

Abstract: A communication device is capable of estimating an incoming wave number with high accuracy. A communication device includes an antenna and circuitry configured to calculate an arrival direction of a reception signal received from the antenna in a case of a predetermined incoming wave number based on the reception signal and the predetermined incoming wave number, calculate an incoming signal for each of one or more arrival directions in a case of a certain incoming wave number based on the incoming wave number and the one or more arrival directions, and estimate an incoming wave number of the reception signal based on levels of the incoming signals in a plurality of arrival directions.

Abstract: A communication apparatus capable of estimating the number of incoming waves with high accuracy is provided. A communication apparatus includes an antenna, a matrix calculator that calculates, based on reception signals received from the antenna, a first matrix having singular values of a reception signal matrix, a matrix calculator that extracts reception signals whose frequency is within a specific frequency range from the reception signals and calculates, based on the extracted reception signals, a second matrix having singular values of a second reception signal matrix, and a number-of-incoming-waves estimator that estimates, based on the first matrix and the second matrix, the number of incoming waves of the reception signals.

Abstract: A work machine in which an engine and a reserving unit configured to reserve lubricating oil to be supplied to the engine are connected by a lubricating oil channel, and the lubricating oil is circulated, wherein at least a part of the lubricating oil channel and at least a part of a working fluid channel for a working fluid to be supplied to a work unit of the work machine are arranged such that heat can be exchanged between the lubricating oil and the working fluid.

Abstract: A muffler for an engine includes: a muffler body provided with a muffling chamber; a discharge pipe configured to discharge exhaust gas that has passed through the muffling chamber to an external space, wherein a downstream edge of the discharge pipe in an exhaust direction is shaped into a wave that is continuous in a circumferential direction.

Abstract: There is provided a work machine. A reserving chamber reserves lubricating oil to be supplied to an engine. A channel forming member forms a channel of the lubricating oil from the reserving chamber to the engine A press-feed unit press-feeds the lubricating oil reserved in the reserving chamber to the engine via the channel forming member. A float floats on an oil surface of the lubricating oil reserved in the reserving chamber A detection unit provided in the reserving chamber and detects the float A determination unit determines a tilt state of the reserving chamber based on a detection result of the detection unit A control unit controls the press-feed unit based on a determination result of the determination unit.

Abstract: A method of producing a resin modifier, the method comprising a process of polymerizing an ethylene unsaturated monomer in the presence of a cellulose nanofiber, the cellulose nanofiber being reacted with an amine or a quaternary ammonium salt compound.

Abstract: A receiver accurately performs, using an annihilation filter, angle estimation in two-dimensional directions of an incoming wave. The receiver operates with at least two linear array antenna. The receiver may be implemented in a radar apparatus includes the receiver, as well as a vehicle and a communication system, which also include the receiver.