Abstract: A stage includes: a substrate mounting member having a mounting surface on which a target substrate is mounted; a support member configured to support the substrate mounting member; a refrigerant flow path formed inside the support member along the mounting surface, and including a ceiling surface disposed on the mounting surface side, a bottom surface opposite to the ceiling surface, and an introduction port for introducing a refrigerant formed on the bottom surface; and a heat insulating member including at least a first planar portion covering a portion of the ceiling surface, which faces the introduction port, and a second planar portion covering an inner side surface of a curved portion of the refrigerant flow path.

Abstract: An encoder comprises first and second sensors which reads first and second tracks, the first and second sensors being arranged in a radial direction to face each other, and a processor which generates a first position signal based on first and second periodic signals based on a signal obtained by reading the first and second tracks by the first sensor, and generates a second position signal based on third and fourth periodic signals based on a signal obtained by reading the first and second tracks by the second sensor, wherein the processor generates an absolute position signal indicating an absolute position of at least one of the scale, the first sensor, or the second sensor based on the first and second position signals and the first and third periodic signals.

Abstract: A baffle unit includes an inner ring, an outer ring disposed outside the inner ring, and a connecting portion connecting the inner ring with the outer ring. The connecting portion includes multiple openings arranged in a radial direction of the baffle unit and in a circumferential direction of the baffle unit, each of the multiple openings being arcuate and extending in the circumferential direction; multiple rigid portions each being disposed between the adjacent openings of the multiple openings that are adjacent to each other on a same concentric circle of the baffle unit; and multiple walls each being formed between the adjacent openings of the multiple openings that are adjacent to each other in the radial direction. Each of the multiple walls connects a rigid portion of the multiple rigid portions with another rigid portion of the multiple rigid portions.

Abstract: To achieve both user convenience and measurement accuracy without degrading reliability. A biopotential measuring electrode according to the present disclosure includes at least a portion in contact with a living body, the portion including: a base material resin layer containing a predetermined resin material, rubber, or an elastomer, as a main component; and a conductive particle contained in the base material resin layer, in which the conductive particle includes a predetermined base material particle, and a surface-treated region in which at least a part of a surface of the base material particle is coated or substituted with a predetermined material.

Abstract: A plasma processing apparatus includes a substrate support having a substrate supporting portion on which a substrate is placed and a peripheral portion surrounding the substrate supporting portion, a conductive focus ring placed on the peripheral portion of the substrate support, a cover ring surrounding an outer periphery of the substrate support and formed of a dielectric material, a conductive ring placed on the cover ring, and a radio frequency power supply electrically coupled to the substrate support. A first surface on an outer peripheral portion of the focus ring and a second surface on an inner peripheral portion of the conductive ring are spaced apart from each other while facing each other. Further, the cover ring has a spacing portion that separates the focus ring from the conductive ring.

Abstract: A form-fill-seal machine forms a bag by filling and sealing a packing object in a wrapping material. The form-fill-seal machine includes a thickness adjustment unit which adjusts a thickness of the bag and a control unit which controls an operation of the thickness adjustment unit. The control unit acquires thickness information obtained in a rear stage of the form-fill-seal machine and relating to a thickness of the bag and controls the operation of the thickness adjustment unit on the basis of a result obtained by performing statistical processing on the thickness information.

Abstract: There is provision of a plasma processing apparatus including a gas supply section, a first radio frequency power supply for plasma generation, a second radio frequency power supply for drawing ions, an electrode coupled to the second radio frequency power supply; and a member serving as an anode paired with the electrode. On a surface of the member, a multilayered film structure is formed to adjust capacitance of the member.

Abstract: An internal combustion engine control device (1) includes an injector-temperature calculation unit (21a), an engine-temperature calculation unit (21b), an operating-state control unit (21c), and an integration-time calculation unit (21d). The engine-temperature calculation unit (21b) calculates an engine temperature by using an injector temperature and a fuel-injection integration time.

Abstract: An internal combustion engine control device (1) includes an injector-temperature calculation unit (21a), an engine-temperature calculation unit (21b), an operating-state control unit (21c), a cold/warmed-up state determination unit (21d), an ambient-temperature calculation unit (21e), and a correction unit (21f). The correction unit (21f) corrects an engine temperature calculated based on an injector temperature, when it is determined that an engine is in a cold state and a difference between the injector temperature and an ambient temperature is equal to or larger than a first predetermined value.

Abstract: Provided is a bag making and packaging machine capable of accurately detecting, with a simple configuration, the timing at which an article that is dropped and supplied from an article supply device disposed above the bag making and packaging machine, will arrive at a lateral sealing mechanism. A bag making and packaging machine receives articles dropped and supplied from a combination weighing machine disposed above the bag making and packaging machine and packages the articles in a bag to be made. The bag making and packaging machine includes a lateral sealing mechanism, a servo motor, and a falling time detector. The lateral sealing mechanism laterally seals a packaging material of a cylindrical shape. The servo motor drives the lateral sealing mechanism.

Abstract: The present invention is a production method of a hot-dip galvanized steel sheet including annealing a belt-shaped steel sheet having a Si content of greater than or equal to 0.2% by mass, wherein the annealing is continuously carried out using an annealing furnace having an oxidation heating zone and a reduction heating zone in this order, while the steel sheet is fed using rollers. The annealing includes oxidizing a surface of the steel sheet in the oxidation heating zone at a temperature at which roll pickup does not occur and reducing an iron oxide layer, formed by the oxidizing, in the reduction heating zone before the iron oxide layer reaches an initial roller in the reduction heating zone.

Abstract: A bucket position acquisition unit acquires a plane position of a contour point of a bucket in a plan view from the top and a height thereof from a work machine having work equipment including a boom, an arm, and the bucket. A current status landform update unit updates a height in current status landform data related to the plane position of the bucket to an upper value on the basis of the height of the bucket in a case where a work state is a predetermined work state.

Abstract: An encoder comprises first and second sensors which reads first and second tracks, the first and second sensors being arranged in a radial direction to face each other, and a processor which generates a first position signal based on first and second periodic signals based on a signal obtained by reading the first and second tracks by the first sensor, and generates a second position signal based on third and fourth periodic signals based on a signal obtained by reading the first and second tracks by the second sensor, wherein the processor generates an absolute position signal indicating an absolute position of at least one of the scale, the first sensor, or the second sensor based on the first and second position signals and the first and third periodic signals.

Abstract: An internal combustion engine control device (1) includes an injector-temperature calculation unit (21a), an engine-temperature calculation unit (21b), an operating-state control unit (21c), and an integration-time calculation unit (21d). The engine-temperature calculation unit (21b) calculates an engine temperature by using an injector temperature and a fuel-injection integration time.

Abstract: A film roll supporting device comprises a shaft body part, a shaft tip part, and a projection part. The shaft body part extends through a central hole of a film roll and having the film roll mounted thereon. The shaft tip part extends in an axis direction of a shaft from one end of the shaft body part on a side to be inserted into the central hole of the film roll. The projection part extends in a direction intersecting the axis direction of the shaft body part from the shaft tip part. The projection part abuts from below to a core of the film roll provisionally placed on the shaft tip part when the mounting of the film roll is performed. A cutout recessed in a direction intersecting the axis direction of the shaft body part is formed in the projection part.

Abstract: A cooling structure includes a cooling target member; a cooling plate including a cooling mechanism, the cooling plate being configured to cool the cooling target member; and a clamp configured to hold the cooling plate. The cooling plate includes a spherical portion having a spherical surface facing the cooling target member and having a center portion that bulges toward the cooling target member with respect to a peripheral edge portion, and a flat portion provided outside the spherical portion so that the spherical portion is thicker than the flat portion. The clamp is configured to apply at least a predetermined pressure only to the spherical portion through a surface of the cooling target member facing the cooling plate.

Abstract: An encoder includes a scale having a pattern column with patterns periodically changing a physical characteristic, a detection element array disposed movable relatively to the scale and including detection elements configured to detect light from the pattern column are arranged in a moving direction, a signal processor configured to convert an output signal from the detection element array into position information. The detection element array includes first to fourth detection elements are arranged in order of the first detection elements, the second detection elements, the first detection elements, the second detection elements, the third detection elements, the fourth detection elements, the third detection elements, and the fourth detection elements. The signal processor generates a first signal based on an output signal from the first and third detection elements and a second signal based on an output signal from the second and fourth detection elements.

Abstract: The present invention provides an exposure apparatus that exposes a substrate via a projection optical system, the apparatus including a supply unit including a first channel to which a first gas containing air is supplied, a second channel to which a second gas higher in oxygen concentration than the first gas is supplied, and a third channel to which a third gas lower in oxygen concentration than the first gas is supplied, and configured to generate a mixture gas by using at least two of the first gas, the second gas, and the third gas, and supply the mixture gas to a space between the substrate and the projection optical system.

Abstract: The present invention provides a marker mounting unit for mounting, for example, a marker such as a RAS marker, that has a detection reference portion accurately detectable. The marker mounting unit of the present invention includes: a lower substrate; and an upper substrate, wherein the marker mounting unit is a laminate in which the upper substrate is laminated on the lower substrate, the lower substrate has a bump serving as a detection reference portion, the upper substrate has a through hole at a position corresponding to the bump of the lower substrate, the bump of the lower substrate is inserted into the through hole of the upper substrate, and the upper substrate has a relative transmittance of 99% or less at least at a periphery of the through hole on at least one surface.

Abstract: The present invention provides a marker capable of reducing noises other than a detection target image. The marker (100) of the present invention includes a lens main body (101) that includes multiple lens units (102) and a substrate (106). The lens units (102) are arranged successively in a planar direction. The lens main body (101) has lens portions (103) on one surface side and has multiple detectable portions (105) that can be detected from the one surface side on the other surface side. The lens main body (101) is arranged on the substrate (106). The marker (100) further includes a non-scattering layer (108) between a surface of the substrate (106) on the lens main body (101) side and a surface of the lens main body (101) on the substrate (106) side.