Abstract: A film deposition apparatus reduces hillock formation while yielding uniform film thickness distribution. A film deposition apparatus of a present embodiment includes: a chamber; a rotary table that circulates and carries a workpiece W along a circumferential transfer path L; multiple targets that contain a film deposition material, and that are provided in positions at different radial distances from a center of rotation of the rotary table; a shield member that forms a film deposition chamber surrounding a region where the film deposition material scatters, and that has an opening on the side facing the circulated and carried workpiece; and a plasma generator that includes a sputter gas introduction unit for introducing a sputter gas into the film deposition chamber, and a power supply unit for applying power to the target, and that generates plasma in the sputter gas G1 in the film deposition chamber.

Abstract: Disclosed is a laser device including: a laser light source configured to emit laser light; a phase control unit configured to receive the laser light emitted from the laser light source, to control a spatial phase of a portion of the laser light, to emit the portion of the light as control light, and to emit another portion of the laser light as non-control light; a first optical system configured to irradiate an object with the control light emitted from the phase control unit; a detector configured to detect the non-control light emitted from the phase control unit; a second optical system configured to cause the non-control light emitted from the phase control unit to converge toward a detection surface of the detector.

Abstract: A laser processing apparatus includes a support unit that supports a wafer including a plurality of functional elements disposed adjacent to each other via a street, an irradiation unit that irradiates the street with laser light, and a control unit that controls the irradiation unit based on information about the streets so that a first region and a second region of the street are simultaneously irradiated with the laser light, and a power of the laser light for removing a surface layer of the street in the first region is higher than a power for removing the surface layer of the street in the first region. The information about the street includes information that a processing threshold value indicating a difficulty of laser processing in the first region is lower than a processing threshold value in the second region.

Abstract: There is provided an information processing apparatus including a controller that, when an autonomous mobile object estimates a self-position, determines which of a first estimation method using a result of sensing by a first sensor unit configured to sense internal world information in relation to the autonomous mobile object and a second estimation method using a result of sensing by a second sensor unit configured to sense external world information in relation to the autonomous mobile object is used by the autonomous mobile object based on whether a state of the autonomous mobile object is a stopped state.

Abstract: A laser processing method includes: a first step of preparing a wafer including a plurality of functional elements disposed to be adjacent to each other via a street; and a second step of, after the first step, irradiating the street with laser light based on information regarding the street such that a surface layer of the street is removed in a first region of the street and the surface layer remains in a second region of the street. The information regarding the street includes information indicating that, when a modified region is formed in the wafer along a line passing through the street, a fracture extending from the modified region does not reach the street along the line in the first region, and reaches the street along the line in the second region.

Abstract: A laser processing method includes a first step of preparing a wafer including a plurality of functional elements disposed to be adjacent to each other via a street, a second step of, after the first step, forming a modified region in the wafer along a line passing through the street, and a third step of, after the second step, irradiating the street with laser light such that a surface layer of the street is removed, and a fracture extending from the modified region reaches a bottom surface of a recess formed by removing the surface layer, along the line.

Abstract: Disclosed is a laser device including: a laser light source configured to emit laser light; a phase control unit configured to receive the laser light emitted from the laser light source, to control a spatial phase of a portion of the laser light, to emit the portion of the light as control light, and to emit another portion of the laser light as non-control light; a first optical system configured to irradiate an object with the control light emitted from the phase control unit; a detector configured to detect the non-control light emitted from the phase control unit; a second optical system configured to cause the non-control light emitted from the phase control unit to converge toward a detection surface of the detector.

Abstract: Disclosed is a laser processing method for imparting compressive residual stress to an object along an objective area on a surface of the object by irradiating the objective area with laser light. The laser processing method includes: a first step of expanding an area irradiated with the laser light toward a first side in the objective area; and a second step of expanding the area irradiated with the laser light toward a second side different from the first side in the objective area.

Abstract: Disclosed is a laser processing method for imparting compressive residual stress to an object along an objective area on a surface of the object by irradiating the objective area with laser light. The laser processing method includes a processing step of scanning the objective area with an irradiation spot of the laser light while increasing a moving average in intensity of the laser light per unit area.

Abstract: A processed product manufacturing method includes preparing a workpiece containing metal and forming a plurality of first regions and a second region along a surface of the workpiece by the irradiation of a laser beam. The first regions are applied with a tensile residual stress. In the second region applied with a compressive residual stress, a plurality of irradiation points separated from each other in the surface of the workpiece are irradiated with the laser beam. The first regions are formed to be separated from each other and each of the first regions is surrounded by the second region when viewed from a direction orthogonal to the surface.

Abstract: An image processing device includes: a detection unit which detects a target object based on edge information acquired from image data; and a judging unit which judges whether a certain region in the image data is an improper region that is not suitable for detection of the target object based on an edge pattern of edge information in the certain region and a feature pattern indicating a feature of the target object, and the detection unit detects the target object excluding a region that has been judged to be the improper region by the judging unit.

Abstract: An image processing device includes: a delimiting line detection unit configured to detect a delimiting line candidate based on image data obtained by capturing a surrounding of a vehicle; an exclusion determination unit configured to determine whether there is a parking-unavailable area in which parking of the vehicle is not permitted; and a parking space detection unit configured to detect the parking space based on the delimiting line candidate. In a case where plural parallel lines that are adjacent to the delimiting line candidate and that have a predetermined angle to the delimiting line candidate is detected, the exclusion determination unit regards an area in which the plural parallel lines are provided as the parking-unavailable area, and prohibits the parking space detection unit from detecting the parking space across the delimiting line candidate adjacent to the parking-unavailable area.

Abstract: An image processing device includes: an extraction unit which extracts, from image data taken by shooting a neighborhood of a vehicle, edge points that are to be used for detecting partition lines of a parking frame and whose edge intensity values are larger than an edge threshold value; and a correction unit which corrects the edge threshold value based on a density of the edge points extracted by the extraction unit.

Abstract: An image processing device includes: a delimiting line detection unit configured to detect a delimiting line candidate based on image data obtained by capturing a surrounding of a vehicle, the delimiting line candidate being a candidate of a delimiting line that delimits a parking space; and an exclusion determination unit configured to determine whether or not to exclude the delimiting line candidate detected by the delimiting line detection unit from the candidate of the delimiting line. In a case where a plurality of the delimiting line candidates is detected within a predetermined range in the image data, the exclusion determination unit determines whether or not to exclude the delimiting line candidate from the candidate of the delimiting line by comparing edge strength of the plurality of delimiting line candidates.

Abstract: An image processing device includes: a detection unit which detects partition line candidates that are candidates for a partition line for partitioning a parking frame, based on edge lines that are detected based on luminance of each pixel of image data taken by shooting a neighborhood of a vehicle; and a generation unit which generates an integrated partition line candidate by integrating the partition line candidates detected by the detection unit, according to a prescribed integration condition.

Abstract: An image processing device includes: an extraction unit which extracts edge lines based on image data taken by an imaging device by shooting a neighborhood of a vehicle; a selection unit which selects, as a pair of edge lines, edge lines that satisfy a prescribed condition from the extracted edge lines; an exclusion unit which, in a case where a non-paint-out region exists between the pair of edge lines, excludes quasi-edge lines that form the non-paint-out region from the pair of edge lines; and a detection unit which detects a partition line that partitions a parking frame based on the pair of edge lines from which the quasi-edge lines are excluded.

Abstract: An image processing device includes: an extraction unit which extracts a horizontal edge line in which edge points are arranged consecutively in a horizontal direction from an image taken that contains an image of a parking frame; a detection unit which detects a three-dimensional indication body to serve as a stop position indication body in the parking frame based on the horizontal edge line extracted by the extraction unit; and a determining unit which, in a case where a plurality of the horizontal edge lines are arranged in a vertical direction in an image of the three-dimensional indication body detected by the detection unit, determines the stop position regarding one of the plurality of the horizontal edge lines other than a highest horizontal edge line in the vertical direction as corresponding to a top end line of the three-dimensional indication body.

Abstract: An image processing device includes: a setting unit configured to set an area, as a first area, in which at least one delimiting line for delimiting a parking space is detected in a first image of plural images continuously captured while moving; and a prediction unit configured to predict, based on the first area, a second area in which the at least one delimiting line is to be detected in at least one second image of the plural images, the at least one second image being captured later in time than the first image.

Abstract: An image processing device includes: an extraction unit configured to extract at least one edge line based on image data obtained by an imaging device configured to capture a surrounding of a vehicle; a giving unit configured to give a priority to each of the at least one edge line; a registration unit configured to register the at least one edge line in descending order of the priority while limiting a number of registration of the at least one edge line to an upper limit or smaller of the number of registration; and a detection unit configured to detect a parking space, based on the at least one edge line registered.

Abstract: An image processing device includes: a calculation unit which calculates chroma values of pixels of image data taken by a shooting device based on differences between R values or G values and B values, respectively; a correction unit which corrects luminance values of pixels that satisfy a prescribed condition for being a yellow pixel using the calculated chroma values as emphasis amounts, respectively; and a detection unit which detects a line drawn on a road surface based on the corrected luminance values.