Patents by Inventor Ryohei Arima

Ryohei Arima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150303103
    Abstract: A catalyst adsorption method can sufficiently adsorb a catalyst to a lower portion of a recess formed in a substrate. A substrate 20 in which a recess 22 is formed is prepared. Then, a catalyst 23 formed of nanoparticles coated with a dispersant is adsorbed to a surface of the substrate 20 by bringing the substrate 20 into contact with a catalyst solution 12 containing the catalyst by a catalyst adsorption device 10. At that time, a high frequency vibration is applied to the catalyst solution 12.
    Type: Application
    Filed: August 8, 2012
    Publication date: October 22, 2015
    Applicants: TOKYO ELECTRON LIMITED, A SCHOOL CORPORATION KANSAI UNIVERSITY
    Inventors: Shoso Shinguhara, Fumihiro Inoue, Hiroshi Miyake, Ryohei Arima, Mitsuaki Iwashita, Takashi Tanaka