Abstract: A processing apparatus for subject of the present invention uses a high voltage electrode and a ground electrode, and generates plasma under atmospheric pressure in a reaction passage through which a to-be-processed subject passes. For example, even fluorocompound such as PFC including CF4 can effectively be decomposed because the fluorocompound is brought into contact with plasma in a small space for sufficient time, and the apparatus has a small and simple structure. Therefore, the apparatus can be added to each process chamber.

Abstract: A processing apparatus for subject of the present invention uses a high voltage electrode and a ground electrode, and generates plasma under atmospheric pressure in a reaction passage through which a to-be-processed subject passes. For example, even fluorocompound such as PFC including CF4 can effectively be decomposed because the fluorocompound is brought into contact with plasma in a small space for sufficient time, and the apparatus has a small and simple structure. Therefore, the apparatus can be added to each process chamber.

Abstract: A gas discharge tube that is capable of lighting in different colors. The gas discharge tube, which may contain neon and mercury vapor, and which has its inner surface coated with a photoluminescent layer, is energized with a pulse current. The resultant color of the light emitted from the gas discharge tube depends in part on the frequency of the pulse current.

Abstract: A discharge tube including a tubular vessel which is filled with gases, and including a first gas and second gas, the first and second gases being different in excitation level and luminous color from each other. A first electrode unit axially applies an electric field to the vessel to generate a positive column in the vessel. A second electrode unit applies an electric field to the vessel to generate a negative glow in an area, the area extending substantially along a wall surface of the vessel and confronting the positive column generated by the electric field applied by the first electrode.

Abstract: A microwave plasma generating apparatus radiates a microwave to a source gas to produce a plasma. A plurality of spaced fins are disposed in a path of travel of the microwave, from the microwave guide to an area of origin of the plasma within the plasma generating chamber to lie in a direction perpendicular to the direction of an electric field of the microwave, for the purpose of locking the position at which the plasma has been produced.

Abstract: A waste gas treating apparatus including a discharge tube comprising a tubular container having a gas introduction opening and a gas leading opening and at least one pair of an anodes and a cathodes placed within the container, a dc or ac power supply connected to said electrodes, and a gas flow passage formed in the discharge tube whereinat least a pair of anodes is provided opposite to each other in the flow passage,at least a pair of cathodes is provided opposite to the anodes in a direction nearly at right angles to the anodes without contacting the anodes in a space including the pair of anodes;a set of electrodes is composed of said pair of anodes and said pair of cathodes;a part or the whole of said anodes and said cathodes are composed of a plurality of plates or pillars and they are electroconductively connected integrally; anda device for forming a magnetic field application device forming a dc or ac magnetic field in the opposing direction of the cathodes is fixed to the discharge tube.

Abstract: A microwave plasma generating apparatus for generating plasma by radiating microwave into a space in which electric discharge takes place contains a plurality of microwave radiating means for radiating a plurality of microwaves having different directions of electric fields from each other. This microwave plasma generating apparatus can produce a diamond thin film by exciting a carbon source gas supplied into the space and bringing the excited gas into contact with a substrate to be formed thereon with the diamond thin film, the substrate being disposed in the space in which the electric discharge is performed. This apparatus can produce a large volume of plasma in a stable fashion and, as a result, provide a diamond thin film in a large area as a whole.

Abstract: A gas discharge tube that is capable of lighting in different colors. The gas discharge tube, which may contain neon and mercury vapor, and which has its inner surface coated with a photoluminescent layer, is energized with a pulse current. The resultant color of the light emitted from the gas discharge tube depends on the combination of the pulse shapes and duty factors constituting the pulse current.

Abstract: A waste gas treating apparatus including a discharge tube comprising a tubular container having a gas introduction opening and a gas leading opening and at least one pair of an anodes and a cathodes placed within the container, a dc or ac power supply connected to said electrodes, and a gas flow passage formed in the discharge tube whereinat least a pair of anodes is provided opposite to each other in the flow passage,at least a pair of cathodes is provided opposite to the anodes in a direction nearly at right angles to the anodes without contacting the anodes in a space including the pair of anodes;a set of electrodes is composed of said pair of anodes and said pair of cathodes;a part of the whole of said anodes and said cathodes are composed of a plurality of plates or pillars and they are electroconductively connected integrally; anda device for forming a magnetic field application device forming a dc or ac magnetic field in the opposing direction of the cathodes is fixed to the discharge tube.

Abstract: An exhaust gas treating apparatus comprised of a discharge tube consisting of a tubular chamber having a gas introduction opening and a gas withdrawal opening and a cathode and an anode provided therein so as to form a gas flow passage, and a dc or ac power supply connected to the electrodes. The cathode is a cathode pair composed of at least one pair of cathodes positioned opposite to each other nearly parallel to the gas flow passage, and a space defined by the cathode pair communicates at one end with the gas introduction opening and at the other with the gas withdrawal opening. The anode is an anode pair composed of at least one pair of anodes positioned opposite to each other within the above space in a direction approximately at right angles to the cathodes and without contact with the cathodes. A magnetic field applying means for forming a dc or ac magnetic field is provided in a direction opposing the cathode.

Abstract: An electronic light radiation tube wherein a cathode and an anode disposed as spaced from each other by a small spacing are housed in an envelope enclosing therein a luminous gas, and a magnetic field is applied to the envelope so as to cause magnetic lines of force of the magnetic field to pass through the envelope, while the magnetic lines of force which have passed through the cathode are prevented from passing through the anode, whereby electrons emitted from the cathode are caused to collide at a high efficiency with the luminous gas throughout the entire interior space of the envelope to excite the gas, and highly uniform light radiation can be realized over the entire envelope.

Abstract: A discharge lamp comprises a high pressure arc tube for high pressure and a low pressure arc tube for low pressure which is electrically connected in parallel to said high pressure arc tube in an outer tube.A lighting equipment comprises a high pressure arc tube for high pressure discharge and a low pressure arc tube for low pressure which is electrically connected in parallel to said high pressure arc tube; and a high frequency lighting starter having 1 KHz to 100 KHz for starting the discharge of said high pressure arc tube.