Patents by Inventor Ryohei Itatani, legal representative

Ryohei Itatani, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Object processing apparatus and plasma facility comprising the same
    Patent number: 7378062
    Abstract: A processing apparatus for subject of the present invention uses a high voltage electrode and a ground electrode, and generates plasma under atmospheric pressure in a reaction passage through which a to-be-processed subject passes. For example, even fluorocompound such as PFC including CF4 can effectively be decomposed because the fluorocompound is brought into contact with plasma in a small space for sufficient time, and the apparatus has a small and simple structure. Therefore, the apparatus can be added to each process chamber.
    Type: Grant
    Filed: May 28, 2001
    Date of Patent: May 27, 2008
    Assignees: Three Tec Co., Ltd., Youth Engineering Co., Ltd.
    Inventors: Ryohei Itatani, Mikio Deguchi, Bencherki Mebarki, Toshihiko Toda, Heitaro Ban, Ryohei Itatani, legal representative, Toshiaki Ishikawa