Patents by Inventor Ryohei MATSUSHITA

Ryohei MATSUSHITA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210391193
    Abstract: A thermocouple guide includes a first tube portion of a straight shape, and a second tube portion connected to the first tube portion and including a curved section that is formed to turn an extension direction from the first tube portion. An outer diameter of at least a tip-side part of the curved section, the tip-side part extending from a tip end of the curved section through a predetermined length, is smaller than an outer diameter of the first tube portion.
    Type: Application
    Filed: June 2, 2021
    Publication date: December 16, 2021
    Applicant: NGK INSULATORS, LTD.
    Inventor: Ryohei MATSUSHITA
  • Publication number: 20210391194
    Abstract: A thermocouple guide includes a straight tube portion and a curved tube portion formed in continuation with the straight tube portion to turn an extension direction from the straight tube portion. A cross-section of a tip-side part of the curved tube portion, the tip-side part occupying a predetermined range including a tip end of the curved tube portion, has an external shape that is obtained by linearly cutting both sides of a circle.
    Type: Application
    Filed: June 2, 2021
    Publication date: December 16, 2021
    Applicant: NGK INSULATORS, LTD.
    Inventor: Ryohei MATSUSHITA
  • Publication number: 20210329743
    Abstract: A ceramic heater includes a ceramic substrate, a resistance heater, a cylindrical shaft, a thermocouple path, and a thermocouple insertion hole. The disc-shaped ceramic substrate has a wafer placement surface at an upper surface. The resistance heater is embedded in the ceramic substrate. The cylindrical shaft supports the ceramic substrate from a lower surface of the ceramic substrate. The thermocouple path is provided between the resistance heater and the wafer placement surface and extends from a start position on a center side to an end position on an outer circumferential side inside the ceramic substrate. The thermocouple insertion hole is open at an inner shaft region of the lower surface of the ceramic substrate surrounded by the cylindrical shaft and communicates with the thermocouple path.
    Type: Application
    Filed: January 25, 2021
    Publication date: October 21, 2021
    Applicant: NGK INSULATORS, LTD.
    Inventor: Ryohei MATSUSHITA
  • Publication number: 20210242053
    Abstract: A ceramic heater includes a ceramic plate having a front surface that serves as a wafer placement surface, resistance heating elements that are embedded in the ceramic plate, a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate, and a thermocouple passage that extends from a start point in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft, to a terminal end position in an outer peripheral portion of the ceramic plate. The thermocouple passage includes a curved portion between the start point and the terminal end position.
    Type: Application
    Filed: December 4, 2020
    Publication date: August 5, 2021
    Applicant: NGK INSULATORS, LTD.
    Inventors: Ryohei MATSUSHITA, Shuichiro MOTOYAMA
  • Publication number: 20210239541
    Abstract: A ceramic heater includes a ceramic plate having a surface that serves as a wafer placement surface, resistance heating elements that are embedded in the ceramic plate, a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate, and a thermocouple passage that extends from a start point in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft, to a terminal end position in an outer peripheral portion of the ceramic plate. The thermocouple passage includes a stepped portion formed at an intermediate position between the start point and the terminal end position, a long-distance portion extending from the start position to the terminal end position, and a short-distance portion extending from the start position to the intermediate position.
    Type: Application
    Filed: December 9, 2020
    Publication date: August 5, 2021
    Applicant: NGK INSULATORS, LTD.
    Inventor: Ryohei MATSUSHITA
  • Publication number: 20200350187
    Abstract: A ceramic heater includes a ceramic plate in which inner circumferential side and outer circumferential side resistance heating elements are built in; and a cylindrical shaft joined to a rear surface of the ceramic plate. The long hole extends from a start point of the ceramic plate to a terminal position of the outer circumferential portion of the ceramic plate. The entrance portion of the long hole is a long groove. The long groove is provided to extend from the start point to an extended area. Terminals are provided at positions other than the long groove and in a shaft inside area.
    Type: Application
    Filed: July 15, 2020
    Publication date: November 5, 2020
    Applicant: NGK INSULATORS, LTD.
    Inventors: Tomohiro TAKAHASHI, Ryohei MATSUSHITA