Abstract: A reactor for generating plasma is provided in a vacuum chamber. The reactor has an opening in the direction of a supporting portion for a deposition base material, and the reactor includes an outer housing and a cylindrical inner wall structure that is inserted in the outer housing and is freely attachable and detachable to and from the outer housing. The cleaning of the reactor is performed with respect to the cylindrical inner wall structure that is simpler in structure than the outer housing, and hence the reactor can be cleaned reliably and with ease, thereby making it possible to improve the operational efficiency and the yield rate. The problem of prolonged operation time resulting from the cleaning of the reactor in a plasma chemical vapor deposition apparatus is thus resolved.

Abstract: A method of manufacturing a metallic thin film type magnetic recording medium is provided. The method comprises the steps of arranging an initial substance of said recording medium in opposition to a plasma discharge electrode, said initial substance comprising a non-magnetic support base, a metallic layer capable of functioning as a metallic electrode formed on said non-magnetic support base and a metallic magnetic layer formed on said metallic layer, and forming a protection film on a surface of said initial substance of said recording medium by way of generating plasma discharge while feeding raw material gas between said metallic layer/said metallic magnetic layer and said plasma discharge electrode.

Abstract: A cleaning tape comprising a nonmagnetic base film, an evaporated metal layer, specifically a magnetic layer or electroconductive layer, formed on the nonmagnetic base film, an inorganic protective film formed on the evaporated metal layer, and surface projections formed on the nonmagnetic base film by particles having a predetermined diameter and density. The tape has a low electric resistivity, a low head abrasion, and a sufficient cleaning effect suitable for cleaning a magnetoresistive type head.

Abstract: A Raman spectrum of a thin film which must be formed is measured in a thin-film forming step for forming the thin film on a member to be processed in an atmosphere, the pressure of which has been reduced. Moreover, the conditions under which the thin film is formed are controlled in accordance with a result of measurement of the Raman spectrum. At this time, the measurement of the Raman spectrum is continuously performed in an in-line manner while the thin film is being continuously formed on the elongated-sheet-like member to be processed. The measurement of the Raman spectrum is performed while the focal point of a probe of a Raman spectrometer is being controlled with respect to the member to be processed or while the output of a laser beam from the Raman spectrometer is being controlled. The thin film which must be. formed is, for example, a protective film of a magnetic recording medium. The protective film is, for example, a hard carbon film (a DLC film).

Abstract: It is to provide an apparatus for producing a thin film, a process for producing a thin film and a guide roller, in which an arc resistant property is provided, and the film formation can be stably conducted with preventing damage of the thin film thus formed. In an apparatus for producing a thin film, such as a plasma CVD apparatus, comprising a vacuum chamber, means for generating a plasma in the vacuum chamber, means for introducing a gas to the vacuum chamber, and a guide roller for running a material to be treated by winding and supporting in the vacuum chamber, an outer peripheral surface of the guide roller in contact and sliding with the material to be treated comprises an electric conductor on both end parts in a width direction of the guide roller, and an electric insulator on a central part thereof.

Abstract: A magnetic recording medium having an excellent sliding durability, and including a magnetic layer of a metal magnetic thin film formed on a non-magnetic support body and a carbon protection film formed on the magnetic layer. Recording and/or reproduction is carried out by sliding a magnetic head. The carbon protection film shows, in a Raman spectrum obtained by Raman spectrum analysis using an argon ion laser having a wavelength of 514.5 nm, an intensity ratio A/B of 2 or above for a main peak intensity A appearing in the vicinity of wave number 1550 cm.sup.-1 with respect to a background intensity B.

Abstract: A magnetic recording medium having at least a thin magnetic metal film and a carbon protective film formed on a non-magnetic substrate, wherein lubricating properties are afforded to a surface portion of the carbon protective film. Specifically, the carbon protective film having a lower layer exhibiting rust-proofing properties and/or an upper layer exhibiting lubricating properties is formed on the thin magnetic metal film. The magnetic recording medium has a good running performance, durability and preservability.

Abstract: A magnetic recording medium having at least a thin magnetic metal film and a carbon protective film formed on a non-magnetic substrate, wherein lubricating properties are afforded to a surface portion of the carbon protective film. Specifically, the carbon protective film having a lower layer exhibiting rust-proofing properties and/or an upper layer exhibiting lubricating properties is formed on the thin magnetic metal film. The magnetic recording medium has a good running performance, durability and preservability.