Abstract: A bonding target member 1 having a solid bonding material 3 with aluminum as a main component is interposed between a metal member 2 and a ceramic member 4 and an elastic member 12 are pressurized by a pressurizing section 13 and a bonding tool section 15 of a resonator 14 in a vertical direction. The bonding tool section 15 of the resonator 14 resonates with sound vibration or ultrasound vibration transmitted from an oscillator 16. An interfacial portion between the metal member 2 and the bonding material 3 with aluminum as a main component and an interfacial portion between the bonding material 3 with aluminum as a main component and the ceramic member 4 each receive pressurization and vibration energy to be bonded together. The metal member 2 and the ceramic member 4 can be bonded together at ordinary temperature in the atmosphere with the bonding material 3 with aluminum as a main component.

Abstract: A bonding target member typically has a solid bonding material with aluminum as a main component interposed between a metal member and a ceramic member. These elements and an elastic member are pressurized by a pressurizing section and a bonding tool section of a resonator in a vertical direction. The bonding tool section of the resonator resonates with sound vibration or ultrasound vibration transmitted from an oscillator. The metal member and the ceramic member can alternatively be bonded together without the intermediate bonding material. In both cases, bonding at ordinary temperature in the atmosphere is possible. When the ceramic member has a thickness resistant to pressurization and vibration energy at the time of bonding to resist cracking, the elastic member may be disposed on the metal member side, or may not be used.

Abstract: A bonding target member 1 having a solid bonding material 3 with aluminum as a main component is interposed between a metal member 2 and a ceramic member 4 and an elastic member 12 are pressurized by a pressurizing section 13 and a bonding tool section 15 of a resonator 14 in a vertical direction. The bonding tool section 15 of the resonator 14 resonates with sound vibration or ultrasound vibration transmitted from an oscillator 16. An interfacial portion between the metal member 2 and the bonding material 3 with aluminum as a main component and an interfacial portion between the bonding material 3 with aluminum as a main component and the ceramic member 4 each receive pressurization and vibration energy to be bonded together. The metal member 2 and the ceramic member 4 can be bonded together at ordinary temperature in the atmosphere with the bonding material 3 with aluminum as a main component.

Abstract: The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism.

Abstract: The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism.

Abstract: An exemplary a charged particle beam apparatus converts an inspection position on a test sample (wafer coordinate system) to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm and a rotating stage being rotated to be moved for the inspection position on the test sample. In this case, inspection devices are arranged over a locus that is drawn by the center of the rotating stage according to the rotation of the rotating arm. A function for calculating errors (e.g., center shift of the rotating stage) and compensating for the errors is provided, by which the precision of inspection is improved in a charged particle beam apparatus equipped with a biaxial rotating stage mechanism.

Abstract: A resonator for joining metal members utilizing ultrasonic vibration includes an ultrasonic horn having a length of at least half wavelength of a resonance frequency of ultrasonic vibration transmitted from a vibrator, and a joining tool provided on the ultrasonic horn so as to project in a direction normal to a vibration transmission direction of the ultrasonic horn at a position of a point of a maximum vibration amplitude of the ultrasonic horn. The joining tool is formed into a linear bar made of a material excellent in acoustic property and is provided on a distal end thereof with a tool head projecting laterally.

Abstract: According to a charged particle beam apparatus of this invention, an inspection position on a test sample (wafer coordinate system) is converted to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm (102,1012) and a rotating stage (103,1011) being rotated to be moved for the inspection position on the test sample. In this case, a plurality of inspection devices are arranged over a locus that is drawn by the center of the rotating stage according to the rotation of the rotating arm. A function for calculating errors (e.g., center shift of the rotating stage) and compensating for the errors is provided, by which the precision of inspection is improved in a charged particle beam apparatus equipped with a biaxial rotating stage mechanism. With this configuration, a charged particle beam apparatus which is small-sized and capable of easy stage control can be realized.

Abstract: A resonator is used for ultrasonic machining and attached to the side or bottom of a liquid tank so as to pass through the liquid tank used in ultrasonic machining equipment for dipping a workpiece part in machining liquid given supersonic vibration. The resonator includes a working vessel formed in one end of the resonator within the liquid tank as a dent opening upward so as to enable the workpiece part to be inserted therein from above and part of the machining liquid in the liquid tank to be accommodated therein as separated from the machining liquid in the liquid tank.

Abstract: The invention relates to a trajectory correction method for a charged particle beam, and provides a low-cost, high accuracy and high-resolution converging optical system for use with a charged particle beam to solve problems with conventional aberration correction systems. To this end, the present invention uses a configuration which forms electromagnetic field which is concentrated towards a center of a beam trajectory axis, causes oblique of the beam to make use of lens effects and bend the trajectory, and consequently, cancels out large external side non-linear effects such a spherical aberration of the electron lens. Specifically, the configuration generates an electric field concentration in a simple manner by providing electrodes above the axis and applying voltages to the electrodes. Further, the above configuration can be realized trough operations using lenses and deflectors with incident axes and image formation positions that are normal.

Abstract: A resonator for joining metal members utilizing ultrasonic vibration includes an ultrasonic horn having a length of at least half wavelength of a resonance frequency of ultrasonic vibration transmitted from a vibrator, and a joining tool provided on the ultrasonic horn so as to project in a direction normal to a vibration transmission direction of the ultrasonic horn at a position of a point of a maximum vibration amplitude of the ultrasonic horn. The joining tool is formed into a linear bar made of a material excellent in acoustic property and is provided on a distal end thereof with a tool head projecting laterally.

Abstract: An ultrasonic vibration bonding resonator includes a resonance body, bonding working portions having a bonding working face and provided at a point of maximum oscillation on upper and lower surfaces of the resonance body and support portions provided at two points of minimum oscillation apart from the bonding working portions to opposite sides in a direction of ultrasonic vibration as projecting from front and back surfaces of the resonance body. It includes a resonance body, tool-attaching portions provided at a point of maximum oscillation on upper and lower surfaces of the resonance body, a bonding working portion having a bonding working face and attached to one of the tool-attaching portions, and support portions provided at two points of minimum oscillation apart from the bonding working portion to opposite sides in a direction of ultrasonic vibration as projecting from front and back surfaces of the resonance body.

Abstract: As an image forming method including comparison between images for three-dimensional image construction or the like and an apparatus for forming such images, there are provided an image forming method and an electron microscope capable of obtaining with high accuracy or efficiency information required for comparison. In the image forming method, an image is formed on the basis of comparison between a plurality of images obtained by applying an electron beam to a specimen at different tilt angles. The method includes obtaining a first transmission image with the electron beam applied in a first direction and a second transmission image with the electron beam applied in a second direction, the second transmission image being formed within a region different from a peripheral blurred region resulting from tilting, and making a search in the first transmission image by using the second transmission image.

Abstract: An ultrasonic vibration bonding resonator includes a resonance body, bonding working portions having a bonding working face and provided at a point of maximum oscillation on upper and lower surfaces of the resonance body and support portions provided at two points of minimum oscillation apart from the bonding working portions to opposite sides in a direction of ultrasonic vibration as projecting from front and back surfaces of the resonance body. Otherwise, it includes a resonance body, tool-attaching portions provided at a point of maximum oscillation on upper and lower surfaces of the resonance body, a bonding working portion having a bonding working face and attached to one of the tool-attaching portions with a screw, support portions provided at two points of minimum oscillation apart from the bonding working portion to opposite sides in a direction of ultrasonic vibration as projecting from front and back surfaces of the resonance body.

Abstract: The invention relates to a trajectory correction method for a charged particle beam, and provides a low-cost, high accuracy and high-resolution converging optical system for use with a charged particle beam to solve problems with conventional aberration correction systems. To this end, the present invention uses a configuration which forms electromagnetic field which is concentrated towards a center of a beam trajectory axis, causes oblique of the beam to make use of lens effects and bend the trajectory, and consequently, cancels out large external side non-linear effects such a spherical aberration of the electron lens. Specifically, the configuration generates an electric field concentration in a simple manner by providing electrodes above the axis and applying voltages to the electrodes. Further, the above configuration can be realized trough operations using lenses and deflectors with incident axes and image formation positions that are normal.

Abstract: As an image forming method including comparison between images for three-dimensional image construction or the like and an apparatus for forming such images, there are provided an image forming method and an electron microscope capable of obtaining with high accuracy or efficiency information required for comparison. In the image forming method, an image is formed on the basis of comparison between a plurality of images obtained by applying an electron beam to a specimen at different tilt angles. The method includes obtaining a first transmission image with the electron beam applied in a first direction and a second transmission image with the electron beam applied in a second direction, the second transmission image being formed within a region different from a peripheral blurred region resulting from tilting, and making a search in the first transmission image by using the second transmission image.

Abstract: There is provided a scanning transmission charged particle beam device by which charged particles of a bright-field image and charged particles of a dark-field image may be clearly separated, and bright-field images and dark-field images with high accuracy may be obtained even in a state in which the scanning range of a charged particle beams on a sample is changed. A deflecting coil is provided below a sample, and a charged particle detector for a dark-field image with an opening is provided below the deflecting coil. A charged particle detector for a bright-field image is provided below the above opening. By the deflecting coil below the sample, a charged particle beam for a bright-field image is configured to be synchronized with the scanning of a particle beam, and to be deflected in an opposite direction to the deflected direction of the particle beam.

Abstract: In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.

Abstract: In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.

Abstract: An ultrasonic vibration cutting method comprising mounting and fixing a part to be cut on a mounting table, moving down an ultrasonic vibration rotation unit, stopping the downward movement of the ultrasonic vibration rotation unit when the cutting blade of the ultrasonic vibration rotation unit reaches a position for cutting the part, moving the ultrasonic vibration rotation unit linearly for cutting, and turning and vibrating the cutting blade with ultrasonic waves to cut the part.