Abstract: A method of aligning each of a plurality of processing areas regularly aligned on a substrate according to designed alignment coordinates to a predetermined reference position in a static coordinate system for defining the moving position of the substrate is disclosed. The coordinate positions, on the static coordinate system, of at least three processing areas selected in advance as specific processing areas from the plurality of processing areas are measured. The coordinate positions, on the static coordinate system, of the plurality of processing areas on the substrate are determined by weighting the coordinate positions, on the static coordinate system, of the at least three specific processing areas according to the distances between a processing area of interest and each of the at least three specific processing areas in units of processing areas on the substrate, and executing a statistic calculation using the plurality of weighted coordinate positions.

Abstract: The invention is to continuously measure the contents of trace ingredients such as alkaline metal contained in combustion gas with high precision. An oxidizer and fuel are supplied into a flue line to form a flame, while a part of the combustion gas is introduced to the flame for inducing light emission. The contents of metal ingredients in the gas are calculated based on the intensity of the emitted light. Since a flame forming device is installed in the flue line without any additional equipment such as a sampling line, and such the contents of trace ingredients in the gas are calculated based on the intensity of the emitted light, the contents of the trace ingredients can be measured with high precision. Quickly responsive monitoring and control are assured.

Abstract: The present invention relates to a steam turbine comprising a rotor shaft integrating high and low pressure portions provided with blades at the final stage thereof having a length not less than 30 inches, wherein a steam temperature at first stage blades is 530.degree. C., a ratio (L/D) of a length (L) defined between bearings of the rotor shaft to a diameter (D) measured between the terminal ends of final stage blades is 1.4 to 2.3. This rotor shaft is composed of heat resisting steel containing by weight 0.15 to 0.4% C, not more than 0.1% Si, 0.05 to 0.25% Mn, 1.5 to 2.5% Ni, 0.8 to 2.5% Cr, 0.8 to 2.5% Mo and 0.15 to 0.35% V and, further, the heat resisting steel may contain at least one of Nb, Ta, W, Ti, Al, Zr, B, Ca, and rare earth elements.