Patents by Inventor Ryoichi SUSUKI

Ryoichi SUSUKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam irradiation device
    Patent number: 9960007
    Abstract: An electron beam irradiation device includes a stage, a main body unit, and a first mechanism. The main body unit includes a substrate, first members, and a first layer. The first members are arranged to be separated in a second direction intersecting a first direction and is provided at a first surface of the substrate opposing the stage. The first layer is provided between the stage and the first members and between the stage and the substrate. The first layer converts a light ray into an electron beam. The first mechanism is provided in the stage and moves the stage in the second direction. A distance of the movement is not less than a spacing between a center in the second direction of the first member and a center in the second direction of one other first member adjacent to the first member.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: May 1, 2018
    Assignee: Toshiba Memory Corporation
    Inventors: Kazuto Matsuki, Ryoichi Susuki, Hiroyuki Kashiwagi, Takashi Sato
  • ELECTRON BEAM IRRADIATION DEVICE
    Publication number: 20170076907
    Abstract: An electron beam irradiation device includes a stage, a main body unit, and a first mechanism. The main body unit includes a substrate, first members, and a first layer. The first members are arranged to be separated in a second direction intersecting a first direction and is provided at a first surface of the substrate opposing the stage. The first layer is provided between the stage and the first members and between the stage and the substrate. The first layer converts a light ray into an electron beam. The first mechanism is provided in the stage and moves the stage in the second direction. A distance of the movement is not less than a spacing between a center in the second direction of the first member and a center in the second direction of one other first member adjacent to the first member.
    Type: Application
    Filed: August 30, 2016
    Publication date: March 16, 2017
    Inventors: Kazuto MATSUKI, Ryoichi SUSUKI, Hiroyuki KASHIWAGI, Takashi SATO