Patents by Inventor Ryoji Kani

Ryoji Kani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070011875
    Abstract: A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.
    Type: Application
    Filed: June 27, 2005
    Publication date: January 18, 2007
    Inventors: Masahiko Kubota, Takumi Suzuki, Tamaki Sato, Ryoji Kani, Maki Hatta, Kazuhiro Asai, Shoji Shiba, Hiroe Ishikura, Akihiko Okano