Abstract: A processing table 3 holding a workpiece 2 is accommodated in a chamber 4 with a gas-tight condition kept, and a liquid column W is jetted to an upper surface of this chamber 4, and a processing head 9 that guides laser beam L to the liquid column W is secured to the upper surface of this chamber 4. An oil-sealed rotary pump 11 and a diffusion pump 12 provided in parallel are connected to the chamber 4, and the diffusion pump 12 is actuated after the actuation of the oil-sealed rotary pump 11, bringing the inside of the chamber 4 into a vacuum state. No gas currents are generated around the liquid column W jetted from the processing head 9, making it possible to prevent turbulence of the liquid column W due to turbulence of the gas currents and enabling a liquid column having a small diameter to be jetted in a stable state.

Abstract: A processing table 3 holding a workpiece 2 is accommodated in a chamber 4 with a gas-tight condition kept, and a liquid column W is jetted to an upper surface of this chamber 4, and a processing head 9 that guides laser beam L to the liquid column W is secured to the upper surface of this chamber 4. Gas exhaust means 5 in which an oil-sealed rotary pump 11 and a diffusion pump 12 are provided in parallel is connected to the chamber 4, and the diffusion pump 12 is actuated after the actuation of the oil-sealed rotary pump 11, brining the inside of the chamber 4 into a vacuum state. Bringing the inside of the chamber 4 into a vacuum state, no gas current is generated around the liquid column W jetted from the processing head 9, making it possible to prevent turbulence of the liquid column W due to turbulence of the gas current. A liquid column having a small diameter can be jetted in a stable state.

Abstract: A hybrid laser processing apparatus 1 includes a laser oscillator 4 which oscillates a laser beam L, a high-pressure pump 5 which supplies liquid, wherein liquid supplied from the high-pressure pump 5 is injected from an injection nozzle 13 provided at a tip of a processing head 6 and becomes a liquid column W to reach an object to be processed 2. A first inclined plane 13b which reduces the diameter toward the object to be processed 2 is formed in the injection nozzle 13, the condensing lens 12 which condenses the laser beam L is designed so that the focus of the laser beam L is positioned beyond the injection nozzle 13 and closer to the side of the object to be processed 2 and the laser beam L on the side outer than the minimum diameter part 13d is reflected on the first inclined plane 13b and thereafter guided to the liquid column W. Positional matching of the condensing lens and the injection nozzle is simple and the guided laser beam does not pop out of the liquid column.

Abstract: Laser beam L oscillated by a laser oscillator 4 is guided by an optical fiber 12 constituting laser-guiding means 7 to a processing head 6, a liquid passageway 25 to which a high-pressure liquid is supplied by a high-pressure pump 5 is formed in the processing head, and this high-pressure liquid is jetted in the form of a liquid column W from a jet hole 24 of a jet nozzle 23 provided at a lower end of the processing head 6. The optical fiber is exposed inside of the liquid passageway, and a tip of a fiber core 12a of the optical fiber projects beyond a fiber clad 12b, and is close to the vicinity of the jet hole. The laser beam irradiated from the fiber core is guided to the liquid column after it is reflected on a first inclined surface 24a formed on the jet hole, and processing on the workpiece 2 is performed. The laser beam can easily be guided to the liquid column.

Abstract: A hybrid laser processing apparatus 1 includes a laser oscillator 4 which oscillates a laser beam L, a high-pressure pump 5 which supplies liquid, wherein liquid supplied from the high-pressure pump 5 is injected from an injection nozzle 13 provided at a tip of a processing head 6 and becomes a liquid column W to reach an object to be processed 2. A first inclined plane 13b which reduces the diameter toward the object to be processed 2 is formed in the injection nozzle 13, the condensing lens 12 which condenses the laser beam L is designed so that the focus of the laser beam L is positioned beyond the injection nozzle 13 and closer to the side of the object to be processed 2 and the laser beam L on the side outer than the minimum diameter part 13d is reflected on the first inclined plane 13b and thereafter guided to the liquid column W. Positional matching of the condensing lens and the injection nozzle is simple and the guided laser beam does not pop out of the liquid column.

Abstract: A minute groove M1 is formed from one end 101a of a division-planned line 101 to the other end 101b thereof by use of a cutter 14A by moving a first working head A, and while the groove M is being irradiated with laser beam L, inspection is performed by use of an inspection device 15 to check whether or not a crack has propagated from the groove M1 and division has been performed. Storage means 13A stores the position of an undivided portion on the basis of a detection signal of this inspection device 15. Thereafter, after the backward movement of the first working head 7A, the undivided portion is again irradiated with laser beam L, with the above-described cutter 14A supported above, whereby the undivided portion is completely divided. Material glass 2 can be divided exactly according to the division-planned line 101 without forming a groove M double in the division-planned line 101.

Abstract: A laser diode is initially secured on a substrate, and light emission is caused from the laser diode to radiate light, which is measured by a measuring instrument. The laser diode is positioned at a position where a maximum output is obtained. Subsequently, while continuing light emission from the laser diode, light output which passes through a solid state laser oscillator element with a reflecting surface is measured with the measuring instrument, and the solid state laser oscillator element with a reflecting surface is secured to the substrate at a position where a maximum output is obtained.

Abstract: The invention relate to a laser oscillator containing at least one pair of main electrodes within a laser tube. In accordance with the first invention, a downstream one of the main electrodes provided within the laser tube which is located downstream, as viewed in the direction of flow of a laser gas, is substantially L-shaped, with its distal end being supported to extend in a direction to intersect with the axial direction of the laser tube. This improves the oscillation efficiency in exciting the laser radiation as compared with the prior art. According to the second aspect of the invention, a pair of ring-shaped pre-ionization electrodes are disposed upstream of the main electrodes, and there is provided a pre-ionization power supply which applies a high voltage, which may be a pulse wave or an alternating voltage, across the pair of pre-ionization electrodes.

Abstract: A punch press having a laser cutting device incorporated therein, including a laser cutting head, a laser generator spaced from the punch press, and a laser beam path adjusting device located between the laser generator and the cutting head is disclosed. More particularly, there is disclosed such a punch press further including a plurality axes, and including a plurality of bend mirrors to redirect the laser beam. Devices are provided for obtaining accurate central alignment and focussing of the beam.

Abstract: A high-speed axial-flow gas laser generator has a plurality of anodes radially provided at the inlet section of the laser tube, and a ring-shaped cathode is provided on the gas discharge section side of the laser tube. On the upstream side from the anodes, viewed from the laser gas flow in the laser tube, a nozzle is provided which imparts a spiral rotary motion to the gas flow in the laser tube.

Abstract: A blower support device for supporting a blower on the frame of a laser generator includes a plurality of air-mounted isolators disposed on the laser generator frame, an air-mounted base supported by the plurality of air-mounted isolators, and a plurality of guide rails provided on the air-mounted base for supporting a surface of the air-mounted base. A plurality of wheels are provided on the blower and engaged with the guide rails. The blower support device may also include an air pressure source and regulator for constant supply of air pressure and individually and freely regulated air pressure to the air-mounted isolators.

Abstract: A beam monitor for a high-output laser has a beam intensity detection means which detects localized beam intensity in the cross section of a high intensity laser beam, and a characteristic calculation means for calculating the beam characteristics of a laser beam based on the localized beam intensity detected by the beam intensity detection means.

Abstract: A high-speed axial-flow gas laser generator has a plurality of anodes radially provided at the inlet section of the laser tube, and a ring-shaped cathode is provided on the gas discharge section side of the laser tube. On the upstream side from the anodes, viewed from the laser gas flow in the laser tube, a nozzle is provided which imparts a spiral rotary motion to the gas flow in the laser tube.

Abstract: A power device for an axial-flow-type CO.sub.2 laser tube in which a high DC voltage is applied to the cathode side of the laser tube, a ballast resistance is connected to the anode side, and power at a high voltage pulse is applied to this anode side so that laser oscillations occur. In addition, the output of the high voltage pulsed power on the anode side is adjusted by PWM control of the switching circuit, controlling the output of the laser. In this way, the cathodes becomes a common structure, cross discharge is prevented, and the response speed of the power feedback is increased.

Abstract: A gas laser oscillator having a gas flow smoothing device, preferably made of a cylindrical mesh, installed in the gas inlet of the electrical discharge region of the oscillator.

Abstract: A laser tube for a laser generator used in a laser machining tool is formed by a plurality of disks laminated together to form an integral unit. The disks have a main hole for the passage of laser gas and at least one sub-hole for a sub-flow of laser gas. The sub-hole of each disk is connected with the respective main hole of the disk by a gas injection channel through which laser gas is injected into the main hole at a plurality of longitudinal positions in the laser tube to provide a homogeneous laser gas velocity distribution in the laser tube.

Abstract: A device for monitoring the discharge voltage of a laser generator comprising a monitor means which detects, at positive electrodes, voltage differences between neighboring laser tubes. The monitor means may include a first monitor to detect voltage at a positive electrode and a second monitor connected to the first to perform a predetermined operation. In the event of an abnormal discharge, the predetermined operation may be a warning signal or an automatic adjustment in power source voltage.

Abstract: A gas oscillator consisting of a plurality of laser tubes with discharge electrodes arranged in a straight line so that the cathodes are next to each other, a gas drive, a heat exchanger to cool a laser gas and an exhaust device provided to expel the laser gas from the laser tubes and containing an injection device for non-ionized gas to separate and expel the ionized gas from the laser tubes so as to suppress electrical discharges between the cathodes of the laser oscillator.

Abstract: A mirror adjustment device in a laser oscillator has a mirror holder which is mounted for free rotation about the X and Y axes of the laser. Pivot means are supported on the mirror holder bracket and about the mirror holder and drive means are connected with the pivot means to selectively rotate the mirror holder to adjust the mirror. Injection holes are also provided in the mirror holder whereby fresh laser gas may be injected in the direction of the mirror to clean and cool the mirror.

Abstract: A holder for the rear mirror of a laser generator has a pressure balance orifice formed in the block supporting the rear mirror in the mirror mounting member. The orifice equalizes the pressure between the chamber through which the laser passes and a chamber formed by the support block and the rear mirror. An additional pressure balance orifice is formed in the support block between a chamber formed by a power monitor supported in the support block and the chamber formed by the rear mirror in the support block, thus equalizing the pressure between these chambers. Another pressure balance orifice is formed in an addditional block supporting a total reflection mirror in the mirror mounting member, between the laser chamber and a chamber formed by the total reflection mirror in the block. Pressure is thus equalized between these two chambers.