Abstract: The present invention provides an ohmic heating-type exhaust gas purification catalyst system. The ohmic heating-type exhaust gas purification catalyst system is configured to perform, based on information of temperature of a catalyst bed input from a temperature detector of an ohmic heating-type exhaust gas purification device, electric current pass control including controls of (1) causing an electric current to pass through a pair of electrodes when the temperature of the catalyst bed is equal to or lower than a first threshold temperature T1 set in a range of 350±25° C., (2) not causing an electric current to pass through the pair of electrodes when the temperature of the catalyst bed exceeds the first threshold temperature T1 and is equal to or lower than a second threshold temperature T2 set in a range of 450±25° C.

Abstract: An electrostatic chuck includes a base body, and an electrostatic electrode embedded in the base body. The base body is a ceramic. The electrostatic electrode has TixOy, which is an oxide of titanium, as a main component, and an atomic ratio y/x is less than 1.7.

Abstract: A solenoid valve includes a coil, a valve element receiving portion, a valve element placed inside of the valve element receiving portion, and a valve portion configured to open and close a gas flow path accompanied with move of the valve element. Either a surface of the valve element opposed to the valve element receiving portion or a surface of the valve element receiving portion opposed to the valve element has a first groove that is extended in an axial direction and a second groove that is arranged to intersect with the first groove and to be extended in a circumferential direction. The first groove is formed to be extended at least from the second groove toward a valve portion-side.

Abstract: Provided is a valve unit including a first gas flow channel to a gas tank and a second gas flow channel branching off from the first gas flow channel and leading to a gas-consuming device. The valve unit can avoid the entrance of water, which may be included in gas, into the second gas flow channel. The first gas flow channel to let gas from the outside in has a bend. The first gas flow channel has a communication port to the gas tank at an end downstream of the bend. A second gas flow channel branches off at a branching part between the bend and the communication port, and the second gas flow channel leads to the gas-consuming device. A straightening member is disposed between the bend and the branching part, and is to straighten the gas flow from the upstream to be parallel to the direction of the first gas flow channel.

Abstract: A solenoid valve includes a coil, a valve element receiving portion, a valve element placed inside of the valve element receiving portion, and a valve portion configured to open and close a gas flow path accompanied with move of the valve element. Either a surface of the valve element opposed to the valve element receiving portion or a surface of the valve element receiving portion opposed to the valve element has a first groove that is extended in an axial direction and a second groove that is arranged to intersect with the first groove and to be extended in a circumferential direction. The first groove is formed to be extended at least from the second groove toward a valve portion-side.

Abstract: Provided is a valve unit including a first gas flow channel to a gas tank and a second gas flow channel branching off from the first gas flow channel and leading to a gas-consuming device. The valve unit can avoid the entrance of water, which may be included in gas, into the second gas flow channel. The first gas flow channel to let gas from the outside in has a bend. The first gas flow channel has a communication port to the gas tank at an end downstream of the bend. A second gas flow channel branches off at a branching part between the bend and the communication port, and the second gas flow channel leads to the gas-consuming device. A straightening member is disposed between the bend and the branching part, and is to straighten the gas flow from the upstream to be parallel to the direction of the first gas flow channel.