Patents by Inventor Ryosuke Owaki

Ryosuke Owaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control device and control method
    Patent number: 8386064
    Abstract: A control device includes a storage unit that stores therein first position information indicating relative positions between one reference processing unit selected from a plurality of processing units and the other non-reference processing units; a first calculation unit that drives the transfer device while a jig formed in the shape of a substrate is held on the transfer device, and calculates a first compensation value for compensating a position deviation between a transfer position of the jig on the transfer device with respect to the reference processing unit and a first transfer target position; and a second calculation unit that calculates a second compensation value for compensating a position deviation between a transfer position of the jig on the transfer device with respect to the non-reference processing unit and a second transfer target position based on the first compensation value and the first position information.
    Type: Grant
    Filed: March 2, 2009
    Date of Patent: February 26, 2013
    Assignee: Tokyo Electron Limited
    Inventor: Ryosuke Owaki
  • CONTROL DEVICE AND CONTROL METHOD
    Publication number: 20110015774
    Abstract: A control device includes a storage unit that stores therein first position information indicating relative positions between one reference processing unit selected from a plurality of processing units and the other non-reference processing units; a first calculation unit that drives the transfer device while a jig formed in the shape of a substrate is held on the transfer device, and calculates a first compensation value for compensating a position deviation between a transfer position of the jig on the transfer device with respect to the reference processing unit and a first transfer target position; and a second calculation unit that calculates a second compensation value for compensating a position deviation between a transfer position of the jig on the transfer device with respect to the non-reference processing unit and a second transfer target position based on the first compensation value and the first position information.
    Type: Application
    Filed: March 2, 2009
    Publication date: January 20, 2011
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Ryosuke Owaki