Abstract: To provide a multilayer reflective film-provided substrate in which the thickness of a diffusion layer in the multilayer reflective film when heated is less likely to change. A multilayer reflective film-provided substrate for reflective mask blank, comprising a substrate, and a multilayer reflective film to reflect EUV light, wherein the multilayer reflective film has a structure such that low refractive index layers and high refractive index layers are alternately stacked; and in a diffraction chart obtained by X-ray diffraction measurement, a crystallite size calculated from a diffraction peak with a maximum intensity attributable to the low refractive index layers is more than 3.1 nm.

Abstract: A reflective mask blank for EUV lithography, comprising: a substrate; and a multilayer reflective film that reflects EUV light, and an absorption film that absorbs EUV light, which are stacked over the substrate in the stated order, wherein the absorption film comprises a metallic element X as a main component, the absorption film comprises a first crystal structure as a crystal structure of the metallic element X stable at normal pressure (1 atm) at 25° C. in a bulk state, and a second crystal structure different from the first crystal structure, and the peak area ratio of the second crystal structure is 9% or more.

Abstract: A lithium ion conductive solid electrolyte material, a lithium ion conductive solid electrolyte, a method for producing the same, or an all-solid-state battery; and the method for producing a lithium ion conductive solid electrolyte material having a crystal structure based on LiTa2PO8 and having at least Li, Ta, P, O, and Zr as constituent elements. The method includes a primary pulverization step of pulverizing a raw material to obtain a primary pulverized product, a firing step of firing the primary pulverized product to obtain a primary fired product, and a secondary pulverization step of pulverizing the primary fired product by using a ball mill to obtain a lithium ion conductive solid electrolyte material.

Abstract: One embodiment of the present invention relates to a solid electrolyte, an all-solid-state battery, or a solid electrolyte material, and the solid electrolyte contains: a lithium ion conducting phase having at least tantalum, phosphorus, and oxygen as constituent elements; and a compound phase having at least phosphorus and oxygen as constituent elements and being free of tantalum, in which, in a scanning transmission electron microscopy-energy dispersive X-ray spectroscopy (STEM-EDX) image, the area proportion of the compound phase is 0.40% or more based on 100% in total of the area of the lithium ion conducting phase, the area of the compound phase, and the area of voids, and the solid electrolyte has at least lithium, tantalum, phosphorus, and oxygen as constituent elements.

Abstract: A lithium ion-conductive oxide or an all-solid-state battery, wherein the lithium ion-conductive oxide has a crystal structure based on LiTa2PO8, and has at least lithium, tantalum, boron, phosphorus, oxygen, and fluorine as constituent elements, wherein a boron content represented by the following formula (1) is 4.0 to 15.0%, and a fluorine content represented by the following formula (2) is 0.5 to 2.0%: The ? number ? of ? B ? ? atoms / ( the ? number ? of ? B ? atoms + the ? number ? of ? P ? atoms ) × 100 ( 1 ) The ? number ? of ? F ? atoms / ( the ? number ? of ? O ? ? atoms + the ? number ? of ? ? F ? atoms ) × 100.

Abstract: Provided is a novel solid electrolyte having excellent lithium ion conductivity. The lithium ion conductive solid electrolyte of the present invention includes a chalcogenide having a monoclinic crystal structure, wherein the monoclinic crystal has an a-axis length of 9.690 to 9.711 ?, a b-axis length of 11.520 to 11.531 ?, a c-axis length of 10.680 to 10.695 ?, and an axis angle ? in the range of 90.01 to 90.08°. The all-solid-state battery of the present invention includes a positive electrode having a positive electrode active material, a negative electrode having a negative electrode active material, and a solid electrolyte layer between the positive electrode and the negative electrode, wherein the solid electrolyte layer includes the lithium ion conductive solid electrolyte.

Abstract: A solid electrolyte material, a solid electrolyte, a method for producing these, and an all-solid-state battery. The solid electrolyte material includes a lithium ion conductive compound (a) including lithium, tantalum, phosphorus, and oxygen as constituent elements, and at least one compound (b) selected from a boron compound, a bismuth compound, and a phosphorus compound, wherein the compound (b) is a compound different from the compound (a).

Abstract: A solid electrolyte material, a solid electrolyte, a method for producing the solid electrolyte, and an all-solid-state battery. The solid electrolyte material includes lithium, tantalum, phosphorus, and oxygen as constituent elements, and a temperature of an exothermic peak in a differential thermal analysis (DTA) curve of the solid electrolyte material is in the range of 500 to 850° C.

Abstract: A solid electrolyte material, a solid electrolyte, a method for producing the solid electrolyte, and an all-solid-state battery. The solid electrolyte material includes lithium, tantalum, phosphorus, and oxygen as constituent elements and includes at least one element selected from boron, niobium, silicon, and bismuth as a constituent element, and is amorphous.

Abstract: One embodiment of the present invention relates to a solid electrolyte material, a solid electrolyte, a method for producing the solid electrolyte, or an all-solid-state battery, and the solid electrolyte material includes lithium, tantalum, phosphorus, and oxygen as constituent elements and has a content of the phosphorus element of more than 5.3 atomic % and less than 8.3 atomic %, and is amorphous.

Abstract: The invention relates to a solid electrolyte material, solid electrolyte, method for producing the solid electrolyte, and all-solid-state battery, and the solid electrolyte material includes lithium, tantalum, phosphorus, and oxygen as constituent elements and includes at least one element selected from boron, niobium, bismuth, and silicon as a constituent element, and satisfies any of requirements (I) to (III). Requirement (I): A peak top of a 31P-NMR spectrum of the solid electrolyte material is in the range of ?9.5 to 5.0 ppm. Requirement (II): A peak top of a 7Li-NMR spectrum of the solid electrolyte material is in the range of ?2.00 to 0.00 ppm. Requirement (III): A peak top of a 31P-NMR spectrum of the solid electrolyte material is in the range of ?9.5 to 5.0 ppm, and a peak top of a 7Li-NMR spectrum of the solid electrolyte material is in the range of ?2.00 to 0.00 ppm.

Abstract: One embodiment of the present invention relates to a solid electrolyte material, a solid electrolyte, a method for producing the solid electrolyte, or an all-solid-state battery, and the solid electrolyte material includes lithium, tantalum, boron, phosphorus, and oxygen as constituent elements, wherein a peak position of a peak having the maximum peak intensity among an 11B-NMR peak is in the range of -15.0 to -5.0 ppm.

Abstract: A lithium ion conductive solid electrolyte or an all-solid-state battery. The lithium ion conductive solid electrolyte satisfies any of (I) to (III): (I) having a crystal structure based on LiTa2PO8 and a crystal structure based on at least one compound selected from LiTa3O8, Ta2O5, and TaPO5; (II) being represented by the stoichiometric formula of Lia1Tab1Bc1Pd1Oe1 where 0.5<a1<2.0, 1.0<b1?2.0, 0<c1<0.5, 0.5<d1<1.0, and 5.0<e1?8.0; (III) being represented by the stoichiometric formula of Lia2Tab2Mac2Bd2Pe2Of2 where 0.5<a2<2.0, 1.0<b2?2.0, 0<c2<0.5, 0<d2<0.5, 0.5<e2<1.0, and 5.0<f2?8.0, and Ma is one or more elements selected from the group consisting of Nb, Zr, Ga, Sn, Hf, Bi, W, Mo, Si, Al, and Ge.

Abstract: The present invention aims to provide a lithium ion-conducting oxide capable of providing a solid electrolyte with an excellent ion conductivity, and a solid electrolyte, a sintered body, an electrode material or an electrode and an all-solid-state battery using the same. The lithium ion-conducting oxide of the present invention includes at least lithium, tantalum, phosphorus, silicon, and oxygen as constituent elements, has a peak in a region of ?20.0 ppm to 0.0 ppm on the solid-state 31P-NMR spectrum, and has a peak in a range of ?80.0 ppm to ?100.0 ppm on the solid-state 29Si-NMR spectrum.

Abstract: The present invention aims to provide a lithium-ion-conducting oxide sintered body capable of providing a solid electrolyte with an excellent ion conductivity, and a solid electrolyte, an electrode and an all-solid-state battery using the same. The lithium-ion-conducting oxide sintered body including at least lithium, tantalum, phosphorus, silicon, and oxygen as constituent elements, and having a polycrystalline structure consisting of crystal grains and grain interfaces formed between the crystal grains.

Abstract: An embodiment of the present invention relates to a lithium ion-conducting oxide or a lithium-ion secondary battery. The lithium ion-conducting oxide includes at least lithium, tantalum, phosphorus, M2, and oxygen as constituent elements, wherein M2 is at least one element selected from the group consisting of elements of the Group 14 and Al (provided that carbon is excluded), a ratio of number of atoms of each constituent element of lithium, tantalum, phosphorus, M2, and oxygen is 1:2:1?y:y:8, wherein y is more than 0 and less than 0.7, and the lithium ion-conducting oxide contains a monoclinic crystal.

Abstract: A lithium ion-conducting oxide including at least lithium, tantalum, M1, phosphorus, and oxygen as constituent elements. M1 is at least one metal element selected from elements of the Group 4, the Group 5, the Group 6, the Group 13, and the Group 14 (provided that tantalum is excluded), a ratio of number of atoms of each constituent element of lithium, tantalum, M1, phosphorus, and oxygen is 1:2?x:x:1:8, wherein x is more than 0 and less than 1, and the lithium ion-conducting oxide contains a monoclinic crystal. Also disclosed is a lithium-ion secondary battery including the lithium ion-conducting oxide.