Abstract: A cryopump includes a thermal shield where a first condensing panel is provided; and a cryocooler connected to the thermal shield; wherein the thermal shield is divided into a plurality of members including a first member and a second member; the first member forms a thermal path between the first condensing panel and the cryocooler; the second member does not form the thermal path; the first member is made of a material having a thermal conductivity higher than a thermal conductivity of a material of the second member; and a material, having a heat capacity smaller than a heat capacity of the first member in a case where the heat capacity of the first member and the heat capacity of the second member are compared with each other under the conditions of the same volumes, is used as the material of the second member.

Abstract: Ice condensed in a portion in a case in which a cryogenic refrigerator is installed, which is cooled by the cryogenic refrigerator, is melted by increasing a temperature of the ice to a melting point of the ice or higher. Then, while the temperature of the melted ice and a pressure thereof are kept to be equal to or higher than a freezing point of water, the pressure is reduced by rough evacuation so as to vaporize water. At a time at which the water is discharged, the pressure is further reduced so as to discharge water vapor. In this manner, regeneration of water is performed in accordance with a state of the water (i.e., a solid state, a liquid state, and a gas state), thereby shortening a regeneration time.

Abstract: Ice condensed in a portion in a case in which a cryogenic refrigerator is installed, which is cooled by the cryogenic refrigerator, is melted by increasing a temperature of the ice to a melting point of the ice or higher. Then, while the temperature of the melted ice and a pressure thereof are kept to be equal to or higher than a freezing point of water, the pressure is reduced by rough evacuation so as to vaporize water. At a time at which the water is discharged, the pressure is further reduced so as to discharge water vapor. In this manner, regeneration of water is performed in accordance with a state of the water (i.e., a solid state, a liquid state, and a gas state), thereby shortening a regeneration time.

Abstract: A cryogenic refrigerator of a cryopump generates cryogenic cooling in an expansion volume by reciprocally moving a displacer in a cylinder. A cryopanel and a cup-shaped shield are received in a vacuum chamber of the cryopump and are cooled by the cryogenic cooling. The shield protects the cryopanel from radiant heat of the vacuum chamber. A louver is provided at an upper opening of the shield. A hole is formed at a bottom or side of the cup-shaped shield defining a storage part. Molecules in the vacuum chamber are solidified at or absorbed by the cryopanel and the shield. During regeneration, temperature of the cryopanel and the shield is increased. Water molecules desorbed and liquefied from the louver, the shield or the cryopanel are accumulated during regeneration at the storage part that has enough volume to store the water molecules.

Abstract: A cryopanel used for a cryopump, the cryopump including a vacuum chamber having a gas flow-in opening; a stage provided in the vacuum chamber; and a cryocooler configured to cool the stage, the cryopump being configured to solidify or absorb a molecule flowing from the gas flow-in opening into the vacuum chamber, the cryopanel includes a first panel held and cooled by the stage, the first panel having a surface facing toward the gas flow-in opening; and a second panel held by the first panel and extending from the first panel in an upstream direction of a gas flow-in, the second panel having a surface where an absorption material layer is formed.

Abstract: A cryopump includes a thermal shield where a first panel 56 is provided; and a cryocooler connected to the thermal shield; wherein the thermal shield is divided into a plurality of members including a first member and a second member; the first member forms a thermal path between the first condensing panel and the cryocooler; the second member does not form the thermal path; the first member is made of a material having a thermal conductivity higher than a thermal conductivity of a material of the second member; and a material, having a heat capacity smaller that a heat capacity of the first member in a case where the heat capacity of the first member and the heat capacity of the second member are compared with each other under the conditions of the same volumes, is used as the material of the second member.

Abstract: Ice condensed in a portion in a case in which a cryogenic refrigerator is installed, which is cooled by the cryogenic refrigerator, is melted by increasing a temperature of the ice to a melting point of the ice or higher. Then, while the temperature of the melted ice and a pressure thereof are kept to be equal to or higher than a freezing point of water, the pressure is reduced by rough evacuation so as to vaporize water. At a time at which the water is discharged, the pressure is further reduced so as to discharge water vapor. In this manner, regeneration of water is performed in accordance with a state of the water (i.e., a solid state, a liquid state, and a gas state), thereby shortening a regeneration time.