Patents by Inventor Ryota Hidaka

Ryota Hidaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microwave plasma processing apparatus
    Patent number: 5172083
    Abstract: A microwave plasma processing apparatus includes a microwave waveguide connected to a microwave power source, a mode converting wave guide and a plasma chamber.
    Type: Grant
    Filed: May 13, 1992
    Date of Patent: December 15, 1992
    Assignee: Nippon Steel Corporation
    Inventors: Ryota Hidaka, Yoshinobu Kawai, Ryuji Koga, Toru Yamaguchi