Abstract: A method of determining a position of a mark including a first pattern arranged in a first layer of a substrate and a second pattern arranged in a second layer of the substrate, includes determining information concerning the position of the mark as provisional position information based on an image of the mark, acquiring relative position information indicating a relative position between the first pattern and the second pattern, and determining the position of the mark based on the provisional position information and the relative position information.

Abstract: This invention provides a coolant composition for an automobile engine which achieves retained thickening effects of a surfactant as a viscosity, and a concentrated coolant composition for an automobile engine used to obtain such coolant composition. Such coolant composition for an automobile engine comprises: (A) a silicone-based oil compound; (B) polyether-modified silicone; (C) a non-silicone-based surfactant; and (D) an aqueous base, wherein the silicone-based oil compound (A) comprises: (A1) at least one selected from among organopolysiloxanes represented by General Formula (1); and (A2) a filler, and the polyether-modified silicone (B) is at least one member selected from among polyoxyalkylene-modified organopolysiloxanes represented by General Formula (2).

Abstract: A coolant composition includes: a viscosity improving agent; at least one alkali metal compound selected from the group consisting of alkali metal salts and alkali metal hydroxides; and a base composed of water and/or at least one alcohol selected from the group consisting of a monohydric alcohol, a dihydric alcohol, a trihydric alcohol, and a glycol monoalkyl ether, wherein the viscosity improving agent is a compound represented by a formula of R1O—(R2O)m—SO3M, where R1 represents a linear or branched alkyl or alkenyl group having 16 to 24 carbon atoms, R2 represents an ethylene group or a propylene group, m represents an average addition molar number of R2O and a number from 0.5 to 10, and M represents a cation or a hydrogen atom, and a kinetic viscosity of the coolant composition is 8.5 mm2/sec or higher at 25° C. and is 2.0 mm2/sec or lower at 100° C.

Abstract: A coolant composition includes: a viscosity improving agent; at least one alkali metal compound selected from the group consisting of alkali metal salts and alkali metal hydroxides; and a base composed of water and/or at least one alcohol selected from the group consisting of a monohydric alcohol, a dihydric alcohol, a trihydric alcohol, and a glycol monoalkyl ether, wherein the viscosity improving agent is a compound represented by a formula of R1O—(R2O)m—SO3M, where R1 represents a linear or branched alkyl or alkenyl group having 16 to 24 carbon atoms, R2 represents an ethylene group or a propylene group, m represents an average addition molar number of R2O and a number from 0.5 to 10, and M represents a cation or a hydrogen atom, and a kinetic viscosity of the coolant composition is 8.5 mm2/sec or higher at 25° C. and is 2.0 mm2/sec or lower at 100° C.

Abstract: An exposure apparatus including an optical system, includes a light shielding plate, a rotational drive unit configured to rotatably drive the light shielding plate around an axis of rotation along an optical path in the optical system, a shift drive unit configured to shift-drive the light shielding plate in a direction intersecting the axis of rotation, an acquisition unit configured to acquire information relating to a relative position between a reference axis serving as a reference when a pattern image is projected on a substrate by the optical system and the axis of rotation, and a control unit configured to control the rotational drive unit and the shift-drive unit so that, when projecting the pattern image on a circumferential portion near an outer edge of the substrate, the light shielding plate is positioned at a predetermined position based on the information relating to the relative position.

Abstract: An exposure apparatus including an optical system, includes a light shielding plate, a rotational drive unit configured to rotatably drive the light shielding plate around an axis of rotation along an optical path in the optical system, a shift drive unit configured to shift-drive the light shielding plate in a direction intersecting the axis of rotation, an acquisition unit configured to acquire information relating to a relative position between a reference axis serving as a reference when a pattern image is projected on a substrate by the optical system and the axis of rotation, and a control unit configured to control the rotational drive unit and the shift-drive unit so that, when projecting the pattern image on a circumferential portion near an outer edge of the substrate, the light shielding plate is positioned at a predetermined position based on the information relating to the relative position.

Abstract: A holding device including an object to be held by the holding device and having six first flat surfaces, a holding member having six second flat surfaces each being opposed to and parallel to a corresponding one of the first flat surfaces, wherein the holding member has three holding portions of one of a protruded shape and a recessed shape, and wherein two of the second flat surfaces define at least a portion of the protruded shape or recessed shape of the holding portions, and rolling elements each being provided between associated ones of the first and second flat surfaces. The object is supported by the holding member through the rolling elements.

Abstract: A holding device 100A according to one preferred form of the invention includes a holding member having holding portions 121 with an approximately V-shaped recess by which a subject member 110 having approximately V-shaped protrusions 111 is held, wherein the V-shaped protrusions 111 are disposed at a pitch of about 120 degrees with respect to the center of the subject member 110 and the holding portions 121 are disposed at positions to be opposed to the V-shaped protrusions, wherein the V-shaped protrusions 111 and the supporting portions 121 have supporting flat surfaces 112 and 112, and 114 and 124 which are opposed to and in parallel to each other, and wherein rolling members 131 are disposed between these parallel flat surfaces.