Abstract: A substrate transport robot system includes a substrate holding hand, a robot arm, a drive to serve as a drive source to operate the robot arm in transport operation, and a driven member to transmit a driving force of the drive. The substrate transport robot system also includes a controller configured or programmed to correct a motion of the robot arm in the transport operation based on a shift in an amount of movement in the transport operation caused by a deviation in transmission between the drive and the driven member.

Abstract: In a robot (100) for use in a vacuum environment, a drive (30) is configured to drive a plurality of arm units (10) connected to each other in conjunction with each other such that a robot arm (1) operates to move a hand (13) within a circular range in a horizontal plane. An interior (1b) of the robot arm (1) is at atmospheric pressure.

Abstract: This robot is provided with a power transmission gear train for driving a joint. The robot is provided with a first gear, a second gear, and a lubrication gear. The second gear has a diameter larger than that of the first gear, and meshes with the first gear. The lubrication gear meshes with the first gear. The rotatable angle range of the joint is limited. The joint is caused to rotate within said rotatable angle range by rotary-driving the first gear in a state of being meshed with the second gear. The lubrication gear is formed of an oil-containing resin.

Abstract: A robot includes a robot arm and a hand. The hand includes a first hand and a second hand arranged on or above the first hand. At least one of the first hand and the second hand has an airtight hollow hand space.

Abstract: A robot includes a robot arm; a drive mechanism for driving the robot arm, the drive mechanism including a gear(s) and a shaft; a temperature sensor for detecting a temperature in the robot arm; and a controller for compensating for influences of thermal expansions of the robot arm, and at least one of the gear(s) and the shaft based on a detection result of the temperature sensor.

Abstract: A robot system includes: a robot including a hand that holds a workpiece and a robot arm to which the hand is coupled; and a controller that moves the robot arm to perform position control of the hand. The controller corrects a target height of the hand in the position control depending on the workpiece held by the hand.

Abstract: A substrate-conveying robot (100) includes a wrist joint (JT3) including a first bearing(s) (42) rotatably supporting a first rotation shaft (41) for rotating a first substrate-holding hand (21), and a second bearing(s) (44) rotatably supporting a second rotation shaft (43) for rotating the second substrate-holding hand (22). The first and second bearings are ball bearings.

Abstract: A robot (100) according to this disclosure includes a robot arm (10), and a hand (20). The hand (20) includes a first hand (21), and a second hand (22) arranged on or above the first hand (21). At least one of the first hand (21) and the second hand (22) has an airtight hollow hand space (S).

Abstract: A robot includes a robot arm; a drive mechanism for driving the robot arm, the drive mechanism including a gear(s) and a shaft; a temperature sensor for detecting a temperature in the robot arm; and a controller for compensating for influences of thermal expansions of the robot arm, and at least one of the gear(s) and the shaft based on a detection result of the temperature sensor.

Abstract: An automatic lubrication robot includes a robot, a grease hose, and a delivery unit. The robot includes a lifting and lowering unit that moves linearly and an arm coupled to the lifting and lowering unit, and the robot is arranged in a clean room to perform an operation. Grease for lubricating the robot passes through the grease hose. In response to the linear movement of the lifting and lowering unit, the delivery unit delivers the grease to the robot via the grease hose.

Abstract: An automatic lubrication robot includes a robot, a grease hose, and a delivery unit. The robot includes a lifting and lowering unit that moves linearly and an arm coupled to the lifting and lowering unit, and the robot is arranged in a clean room to perform an operation. Grease for lubricating the robot passes through the grease hose. In response to the linear movement of the lifting and lowering unit, the delivery unit delivers the grease to the robot via the grease hose.

Abstract: A transporter vehicle management system includes: a loading weight data acquisition unit that acquires loading weight data indicating a loading weight of a load on a transporter vehicle; a vehicle speed data acquisition unit that acquires vehicle speed data indicating a traveling speed of the transporter vehicle; a road surface data acquisition unit that acquires road surface data indicating a condition of a road surface on which the transporter vehicle travels; a current damage amount calculation unit that calculates a current damage amount of the transporter vehicle on the basis of the loading weight, the traveling speed, and the condition of the road surface; a target amount calculation unit that calculates a target loading weight or a target traveling speed in which the current damage amount is set to a predetermined value; and an output unit that outputs the target loading weight or the target traveling speed.

Abstract: A robot includes first and second arms to rotate and convey an object; a first rotary body to support the first arm and having a first fluid passage and at least one second fluid passage communicating with the first fluid passage; a base-end-side arm formed with an internal space and a hole part into which a part of the first rotary body is inserted; a second rotary body to support the second arm and having a third fluid passage communicating at one end thereof with the second fluid passage and communicating at the other end thereof with the internal space; a supplying device disposed in the internal space and connected to an upstream-end side of the first fluid passage, and to supply fluid to the first fluid passage; a first motor to rotate the first rotary body; and a second motor to rotate the second rotary body.

Abstract: A robot includes first and second arms to rotate and convey an object; a first rotary body to support the first arm and having a first fluid passage and at least one second fluid passage communicating with the first fluid passage; a base-end-side arm formed with an internal space and a hole part into which a part of the first rotary body is inserted; a second rotary body to support the second arm and having a third fluid passage communicating at one end thereof with the second fluid passage and communicating at the other end thereof with the internal space; a supplying device disposed in the internal space and connected to an upstream-end side of the first fluid passage, and to supply fluid to the first fluid passage; a first motor to rotate the first rotary body; and a second motor to rotate the second rotary body.

Abstract: A transporter vehicle management system includes: a loading weight data acquisition unit that acquires loading weight data indicating a loading weight of a load on a transporter vehicle; a vehicle speed data acquisition unit that acquires vehicle speed data indicating a traveling speed of the transporter vehicle; a road surface data acquisition unit that acquires road surface data indicating a condition of a road surface on which the transporter vehicle travels; a current damage amount calculation unit that calculates a current damage amount of the transporter vehicle on the basis of the loading weight, the traveling speed, and the condition of the road surface; a target amount calculation unit that calculates a target loading weight or a target traveling speed in which the current damage amount is set to a predetermined value; and an output unit that outputs the target loading weight or the target traveling speed.

Abstract: A road surface condition determining method according to the invention includes: detecting a suspension pressure of a dump truck during a travel of the dump truck; calculating a maximum amplitude and a frequency of a detection value of the suspension pressure in a predetermined period of time; and determining a road surface condition based on the maximum amplitude and the frequency.

Abstract: A road surface condition determining method according to the invention includes: detecting a suspension pressure of a dump truck during a travel of the dump truck; calculating a maximum amplitude and a frequency of a detection value of the suspension pressure in a predetermined period of time; and determining a road surface condition based on the maximum amplitude and the frequency.