Patents by Inventor Ryou Matsuo

Ryou Matsuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composite ceramic body, and component member for semiconductor manufacturing apparatus
    Patent number: 9079800
    Abstract: A composite ceramic body which includes three phases consisting of a MgO phase, a YAP (YAlO3) phase and a spinel (MgAl2O4) phase. This composite ceramic body has a plasma resistance greater than that of alumina and approximately equal to that of MgO. Mechanical properties, such as hardness and bending strength, of the composite ceramic body, are approximately equal or superior to those of Al2O3. A raw material cost and a manufacturing cost thereof are lower than those of a rare-earth oxide. Further, electric conductive particles may be added thereto to lower an electrical resistivity. The composite ceramic body is suitably usable as component parts for a semiconductor manufacturing equipment.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: July 14, 2015
    Assignee: NIPPON TUNGSTEN CO., LTD
    Inventors: Kouta Tsutsumi, Ryou Matsuo, Mitsuyoshi Nagano