Patents by Inventor Ryouga Kamo

Ryouga Kamo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Liquid processing apparatus and cleaning method
    Patent number: 9387520
    Abstract: Disclosed are a liquid processing apparatus and a cleaning method which may perform cleaning on a portion which is not in the vicinity of a drain section in an exhaust route. The liquid processing apparatus includes an exhaust section provided in vicinity of the drain section, which is configured to exhaust a surrounding atmosphere of the substrate held by the substrate holding unit; an exhaust route forming member configured to form an exhaust route reaching the exhaust section; and a first cleaning unit configured to supply a cleaning liquid to the exhaust route forming member at the exhaust route side.
    Type: Grant
    Filed: July 15, 2013
    Date of Patent: July 12, 2016
    Assignee: Tokyo Electron Limited
    Inventors: Nobuhiro Ogata, Terufumi Wakiyama, Yoshihiro Kai, Ryouga Kamo, Yoshinori Ikeda
  • LIQUID PROCESSING APPARATUS AND CLEANING METHOD
    Publication number: 20140026927
    Abstract: Disclosed are a liquid processing apparatus and a cleaning method which may perform cleaning on a portion which is not in the vicinity of a drain section in an exhaust route. The liquid processing apparatus includes an exhaust section provided in vicinity of the drain section, which is configured to exhaust a surrounding atmosphere of the substrate held by the substrate holding unit; an exhaust route forming member configured to form an exhaust route reaching the exhaust section; and a first cleaning unit configured to supply a cleaning liquid to the exhaust route forming member at the exhaust route side.
    Type: Application
    Filed: July 15, 2013
    Publication date: January 30, 2014
    Inventors: Nobuhiro Ogata, Terufumi Wakiyama, Yoshihiro Kai, Ryouga Kamo, Yoshinori Ikeda