Patents by Inventor Ryugo IIDA

Ryugo IIDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ANALYZING METHOD, ANALYSIS APPARATUS, MEASURING METHOD, MEASUREMENT APPARATUS, EXPOSING METHOD, AND EXPOSURE APPARATUS
    Publication number: 20240045348
    Abstract: An analyzing method includes preparing measured position information that is position information of a plurality of measured-parts formed on a substrate, and fitting a reference function, which is a sum of at least one function obtained by multiplying a criterion function expressed using a first type Bessel function by a proportional coefficient, to the measured position information and calculating an optimum value of at least one of the proportional coefficient.
    Type: Application
    Filed: October 20, 2023
    Publication date: February 8, 2024
    Applicant: NIKON CORPORATION
    Inventors: Ayako SUGIMOTO, Ryugo IIDA, Shinji WAKAMOTO