Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: Provided is a technique of processing a substrate by executing a process recipe including a plurality of steps, the technique including: (a) acquiring vibration data of a member that exhausts an atmosphere in a process chamber that processes the substrate from a vibration sensor while executing the process recipe; and (b) detecting presence of an abnormality sign in a case where a ratio between a magnitude of vibration at a rotation frequency of the member and a magnitude of vibration at a comparison frequency that is an integral multiple of the rotation frequency exceeds a preset abnormality sign threshold on the basis of the acquired vibration data.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: An example control method is a method for controlling an air conditioner to turn a state in closed space to a predetermined target state. The control method includes: setting a target value for controlling a physical quantity; measuring the physical quantity at different positions in the closed space, and calculating a moving average of measurements of the physical quantity measured at each of the different positions; and controlling the air conditioner in such a manner that a median between the maximum value and the minimum value of the plurality of calculated moving averages is the target value.

Abstract: A plurality of fluorescent lamps 30 are in a decentered layout so as to be placed in a peripheral part of an upper space of an environmental test chamber 11 above a sample loading surface 21. The irradiance distribution of light from the fluorescent lamps 30 over the sample loading surface 21 is in the range of ±25% relative to the irradiance at the center of the sample loading surface 21.

Abstract: An example control method is a method for controlling an air conditioner to turn a state in closed space to a predetermined target state. The control method includes: setting a target value for controlling a physical quantity; measuring the physical quantity at different positions in the closed space, and calculating a moving average of measurements of the physical quantity measured at each of the different positions; and controlling the air conditioner in such a manner that a median between the maximum value and the minimum value of the plurality of calculated moving averages is the target value.

Abstract: A plurality of fluorescent lamps 30 are in a decentered layout so as to be placed in a peripheral part of an upper space of an environmental test chamber 11 above a sample loading surface 21. The irradiance distribution of light from the fluorescent lamps 30 over the sample loading surface 21 is in the range of ±25% relative to the irradiance at the center of the sample loading surface 21.

Abstract: Fluid containing organic substances, which has not processed yet, is fed to a plurality of cylinders, using a slurry pump. A free piston is included in each cylinder, the fluid which has not yet been processed is introduced into one of two chambers in the cylinder partitioned by the piston, and processed high-pressure fluid which has been processed is introduced into the other one of the two chamber in the cylinder. The piston pressurizes the fluid with which the cylinder has been filled up. A pressure holding valve is provided in a processed high-pressure fluid system to pressurize an organic substance processing system, and this pressure holding valve suppresses changes in the pressure in the processed high-pressure fluid system.

Abstract: A waste incineration heat conversion system has an incinerator for burning waste discharged from an installation, a heat recovering section for recovering the heat generated by combustion of the waste in the incinerator, a cold generating section for generating cold by utilizing the thus recovered heat, and a pipe line for conveying the thus generated cold to the installation so that the thus conveyed cold is utilized in the installation for a purpose.

Abstract: A high efficiency and economic refuse incineration power generation system capable of stable and continuous refuse incineration operation which can adapt to fluctuation in calorific values in the refuse incinerator has been provided, wherein the same system comprises the refuse incinerator having the heat exchanger through which the medium flows, the steam turbine which is coupled to the generator, and the refrigerator which supplies cooling water to the condenser, and wherein the medium discharged from the steam turbine is circulated to the boiler via the condenser where the medium is condensed to a condensate by enhanced cooling, a portion of the vapor generated in the refuse incinerator is branched in the upper stream of the steam turbine to be supplied to the refrigerator, and the working medium discharged from the refrigerator is caused to converge with the medium flow discharged from the condenser.

Abstract: Object of the present invention is to provide an apparatus in which water, oil or grease are maintained on an ordinary using surface in a stable condition by preventing the water, the oil or the grease from moving to other surface than the ordinary using surface.The present invention relates to an apparatus using water, oil, or grease, especially, the apparatus in which surroundings of the surface maintaining the water, the oil, or the grease are reformed by fluorinated compound. In accordance with the present invention, seeping out of the water, the oil, or the grease are prevented, the water, the oil, or the grease are certainly held at the using surface, and stable performance is maintained for a long time.

Abstract: An electronic equipment has heat pipes for radiating heat generated from heat generating electronic parts. The electronic parts are arranged such that electronic parts generating more heat are arranged nearer to a heat radiating portion of each heat pipe to prevent a phenomenon of dryout and radiate the heat efficiently, whereby heat generated from the electronic parts such as LSI chips can be effectively radiated and an excessive rise in temperature of the electronic parts can be suppressed. When the invention is applied to computers, the entire computer size can be reduced.

Abstract: An unit-type air conditioning system is provided to enable low-load operation of an absorption chiller heater, to thereby improve the load responsiveness, and to use such a chiller heater as an outdoor unit. A plurality of burners are provided in a high temperature generator of the absorption chiller heater, thereby enabling the low-load operation. A refrigerant return valve is provided so as to speed up the stop operation. Flow rates of pumps are controlled in accordance with detected values of temperatures in the chiller heater and a load change, thus improving the load responsiveness. Further, in the air conditioning system with this chiller heater serving as an outdoor unit, required operation prediction is performed on the basis of outer signals from load units and the like, and prediction control according to its result is conducted, further improving the load responsiveness.

Abstract: Mineral impurities can be effectively removed from coal by introducing oil droplets into an aqueous slurry of pulverized coal. Coal, which is lipophilic, attaches to the surface of the oil droplets and floats upwardly along with the oil droplets utilizing their buoyancy. On the other hand, mineral impurities, which are hydrophilic, are left in the aqueous slurry.

Abstract: Nitrogen oxides are removed from a flue gas by wet process, where the flue gas is contacted with a solution of transition metal complex compounds capable of reacting with oxygen in the presence of oxygen, thereby forming oxygen complexes, and the nitrogen oxides are oxidized and absorbed by the oxygen complexes.

Abstract: The present invention relates to a process for removing nitrogen oxides contained in a gaseous mixture such as combustion flue gas, etc. by reduction of the nitrogen oxides with ammonia, and a cuprous or cupric halide is used as a catalyst to carry out the reduction in a low temperature range. As a result, nitrogen oxides can be satisfactorily removed by the reduction even at about 150.degree. C.