Patents by Inventor Ryuichi Kaji

Ryuichi Kaji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230223285
    Abstract: Provided is a technique of processing a substrate by executing a process recipe including a plurality of steps, the technique including: (a) acquiring vibration data of a member that exhausts an atmosphere in a process chamber that processes the substrate from a vibration sensor while executing the process recipe; and (b) detecting presence of an abnormality sign in a case where a ratio between a magnitude of vibration at a rotation frequency of the member and a magnitude of vibration at a comparison frequency that is an integral multiple of the rotation frequency exceeds a preset abnormality sign threshold on the basis of the acquired vibration data.
    Type: Application
    Filed: March 22, 2023
    Publication date: July 13, 2023
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Yuta TACHI, Takayuki KAWAGISHI, Kazuyoshi YAMAMOTO, Ryuichi KAJI, Masanori SAKAI
  • Patent number: 11237538
    Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.
    Type: Grant
    Filed: March 24, 2017
    Date of Patent: February 1, 2022
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki Kawagishi, Kayoko Yashiki, Yukio Miyata, Hiroyuki Iwakura, Masanori Okuno, Kenichi Fujimoto, Ryuichi Kaji
  • Publication number: 20220019191
    Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.
    Type: Application
    Filed: September 29, 2021
    Publication date: January 20, 2022
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
  • Publication number: 20200192324
    Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.
    Type: Application
    Filed: February 25, 2020
    Publication date: June 18, 2020
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
  • Publication number: 20170285613
    Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.
    Type: Application
    Filed: March 24, 2017
    Publication date: October 5, 2017
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
  • Patent number: 9151511
    Abstract: An example control method is a method for controlling an air conditioner to turn a state in closed space to a predetermined target state. The control method includes: setting a target value for controlling a physical quantity; measuring the physical quantity at different positions in the closed space, and calculating a moving average of measurements of the physical quantity measured at each of the different positions; and controlling the air conditioner in such a manner that a median between the maximum value and the minimum value of the plurality of calculated moving averages is the target value.
    Type: Grant
    Filed: October 28, 2009
    Date of Patent: October 6, 2015
    Assignee: NAGANO SCIENCE CO., LTD.
    Inventors: Yasuharu Jin, Ryuichi Kaji
  • Patent number: 8156830
    Abstract: A plurality of fluorescent lamps 30 are in a decentered layout so as to be placed in a peripheral part of an upper space of an environmental test chamber 11 above a sample loading surface 21. The irradiance distribution of light from the fluorescent lamps 30 over the sample loading surface 21 is in the range of ±25% relative to the irradiance at the center of the sample loading surface 21.
    Type: Grant
    Filed: November 5, 2007
    Date of Patent: April 17, 2012
    Assignee: Nagano Science Co., Ltd.
    Inventors: Ryuichi Kaji, Satoshi Koide, Kenji Matsushita
  • Publication number: 20110213501
    Abstract: An example control method is a method for controlling an air conditioner to turn a state in closed space to a predetermined target state. The control method includes: setting a target value for controlling a physical quantity; measuring the physical quantity at different positions in the closed space, and calculating a moving average of measurements of the physical quantity measured at each of the different positions; and controlling the air conditioner in such a manner that a median between the maximum value and the minimum value of the plurality of calculated moving averages is the target value.
    Type: Application
    Filed: October 28, 2009
    Publication date: September 1, 2011
    Applicant: NAGANO SCIENCE CO., LTD.
    Inventors: Yasuharu Jin, Ryuichi Kaji
  • Publication number: 20100000344
    Abstract: A plurality of fluorescent lamps 30 are in a decentered layout so as to be placed in a peripheral part of an upper space of an environmental test chamber 11 above a sample loading surface 21. The irradiance distribution of light from the fluorescent lamps 30 over the sample loading surface 21 is in the range of ±25% relative to the irradiance at the center of the sample loading surface 21.
    Type: Application
    Filed: November 5, 2007
    Publication date: January 7, 2010
    Applicant: NAGANO SCIENCE CO., LTD.
    Inventors: Ryuichi Kaji, Satoshi Koide, Kenji Matsushita
  • Patent number: 6206658
    Abstract: Fluid containing organic substances, which has not processed yet, is fed to a plurality of cylinders, using a slurry pump. A free piston is included in each cylinder, the fluid which has not yet been processed is introduced into one of two chambers in the cylinder partitioned by the piston, and processed high-pressure fluid which has been processed is introduced into the other one of the two chamber in the cylinder. The piston pressurizes the fluid with which the cylinder has been filled up. A pressure holding valve is provided in a processed high-pressure fluid system to pressurize an organic substance processing system, and this pressure holding valve suppresses changes in the pressure in the processed high-pressure fluid system.
    Type: Grant
    Filed: December 14, 1999
    Date of Patent: March 27, 2001
    Assignees: Hitachi, Ltd., Hitachi Plant Engineering Co., Ltd.
    Inventors: Akira Nishioka, Hiroshi Kusumoto, Keiji Sasao, Hiroshige Kikuchi, Takao Sato, Ryuichi Kaji, Shinji Aso, Hitoshi Kawajiri, Satoshi Miyabayashi
  • Patent number: 5678420
    Abstract: A waste incineration heat conversion system has an incinerator for burning waste discharged from an installation, a heat recovering section for recovering the heat generated by combustion of the waste in the incinerator, a cold generating section for generating cold by utilizing the thus recovered heat, and a pipe line for conveying the thus generated cold to the installation so that the thus conveyed cold is utilized in the installation for a purpose.
    Type: Grant
    Filed: October 24, 1995
    Date of Patent: October 21, 1997
    Assignee: Hitachi, Ltd.
    Inventors: Toshiko Fukushima, Yasuo Koseki, Akinobu Hayashi, Ryuichi Kaji
  • Patent number: 5675970
    Abstract: A high efficiency and economic refuse incineration power generation system capable of stable and continuous refuse incineration operation which can adapt to fluctuation in calorific values in the refuse incinerator has been provided, wherein the same system comprises the refuse incinerator having the heat exchanger through which the medium flows, the steam turbine which is coupled to the generator, and the refrigerator which supplies cooling water to the condenser, and wherein the medium discharged from the steam turbine is circulated to the boiler via the condenser where the medium is condensed to a condensate by enhanced cooling, a portion of the vapor generated in the refuse incinerator is branched in the upper stream of the steam turbine to be supplied to the refrigerator, and the working medium discharged from the refrigerator is caused to converge with the medium flow discharged from the condenser.
    Type: Grant
    Filed: September 27, 1995
    Date of Patent: October 14, 1997
    Assignee: Hitachi, Ltd.
    Inventors: Akira Yamada, Yoshinari Hori, Yasuo Koseki, Ryuichi Kaji
  • Patent number: 5346633
    Abstract: Object of the present invention is to provide an apparatus in which water, oil or grease are maintained on an ordinary using surface in a stable condition by preventing the water, the oil or the grease from moving to other surface than the ordinary using surface.The present invention relates to an apparatus using water, oil, or grease, especially, the apparatus in which surroundings of the surface maintaining the water, the oil, or the grease are reformed by fluorinated compound. In accordance with the present invention, seeping out of the water, the oil, or the grease are prevented, the water, the oil, or the grease are certainly held at the using surface, and stable performance is maintained for a long time.
    Type: Grant
    Filed: March 17, 1992
    Date of Patent: September 13, 1994
    Assignee: Hitachi, Ltd.
    Inventors: Takayuki Nakakawaji, Atsushi Morihara, Mitsuyoshi Shoji, Koji Sato, Yutaka Ito, Ryuichi Kaji, Hiroshi Go
  • Patent number: 5331510
    Abstract: An electronic equipment has heat pipes for radiating heat generated from heat generating electronic parts. The electronic parts are arranged such that electronic parts generating more heat are arranged nearer to a heat radiating portion of each heat pipe to prevent a phenomenon of dryout and radiate the heat efficiently, whereby heat generated from the electronic parts such as LSI chips can be effectively radiated and an excessive rise in temperature of the electronic parts can be suppressed. When the invention is applied to computers, the entire computer size can be reduced.
    Type: Grant
    Filed: August 28, 1992
    Date of Patent: July 19, 1994
    Assignee: Hitachi, Ltd.
    Inventors: Katsunori Ouchi, Atsushi Morihara, Yoshio Naganuma, Koji Sato, Ryuichi Kaji
  • Patent number: 5289868
    Abstract: An unit-type air conditioning system is provided to enable low-load operation of an absorption chiller heater, to thereby improve the load responsiveness, and to use such a chiller heater as an outdoor unit. A plurality of burners are provided in a high temperature generator of the absorption chiller heater, thereby enabling the low-load operation. A refrigerant return valve is provided so as to speed up the stop operation. Flow rates of pumps are controlled in accordance with detected values of temperatures in the chiller heater and a load change, thus improving the load responsiveness. Further, in the air conditioning system with this chiller heater serving as an outdoor unit, required operation prediction is performed on the basis of outer signals from load units and the like, and prediction control according to its result is conducted, further improving the load responsiveness.
    Type: Grant
    Filed: April 10, 1992
    Date of Patent: March 1, 1994
    Assignee: Hitachi, Ltd.
    Inventors: Yasuo Koseki, Ryuichi Kaji, Hiroaki Yoda, Takashi Nakao, Tomihisa Ohuchi, Akira Nishiguchi, Daisuke Hisajima, Katsuya Ebara
  • Patent number: 4456528
    Abstract: Mineral impurities can be effectively removed from coal by introducing oil droplets into an aqueous slurry of pulverized coal. Coal, which is lipophilic, attaches to the surface of the oil droplets and floats upwardly along with the oil droplets utilizing their buoyancy. On the other hand, mineral impurities, which are hydrophilic, are left in the aqueous slurry.
    Type: Grant
    Filed: November 10, 1981
    Date of Patent: June 26, 1984
    Assignees: Hitachi, Ltd., Babcock-Hitachi Kabushiki Kaisha
    Inventors: Hidetoshi Akimoto, Ryuichi Kaji, Takeo Komuro, Yasushi Muranaka, Hideo Kikuchi, Yukio Hishinuma, Fumito Nakajima, Hiroshi Terada
  • Patent number: 4081509
    Abstract: Nitrogen oxides are removed from a flue gas by wet process, where the flue gas is contacted with a solution of transition metal complex compounds capable of reacting with oxygen in the presence of oxygen, thereby forming oxygen complexes, and the nitrogen oxides are oxidized and absorbed by the oxygen complexes.
    Type: Grant
    Filed: March 19, 1976
    Date of Patent: March 28, 1978
    Assignees: Hitachi, Ltd., Babcock-Hitachi Kabushiki Kaisha
    Inventors: Yukio Hishinuma, Hidetoshi Akimoto, Ryuichi Kaji, Fumito Nakajima, Yoshijiro Arikawa
  • Patent number: 4031185
    Abstract: The present invention relates to a process for removing nitrogen oxides contained in a gaseous mixture such as combustion flue gas, etc. by reduction of the nitrogen oxides with ammonia, and a cuprous or cupric halide is used as a catalyst to carry out the reduction in a low temperature range. As a result, nitrogen oxides can be satisfactorily removed by the reduction even at about 150.degree. C.
    Type: Grant
    Filed: January 30, 1976
    Date of Patent: June 21, 1977
    Assignees: Hitachi, Ltd., Babcock-Hitachi K.K.
    Inventors: Hidetoshi Akimoto, Ryuichi Kaji, Hideo Kikuchi, Yukio Hishinuma, Yoshijiro Arikawa