Abstract: A probe scanning device has a first tubular member extending in a z direction. A second tubular member has a rear end portion extending into the first tubular member to define a space between an inner peripheral surface portion of the first tubular member and an outer peripheral surface portion of the second tubular member. A probe tip is mounted on a front end portion of the second tubular member. A viscous material is disposed in the space between the first tubular member and the second tubular member. A moving mechanism reciprocally moves the first tubular member in an xy direction, and a voice coil motor drives the second tubular member towards the first tubular member in the z direction. A drive mechanism has a coarse adjustment mode for coarsely moving the probe tip toward a surface of a sample and a measurement mode for fine movement of the probe tip in the z direction to maintain a given relationship between relative positions of the probe tip and the sample surface after coarse movement.

Abstract: A scanning probe instrument which can calibrate measured values and permits accurate length measurements regardless of a magnification factor. A scan signal generator produces a fine movement signal that is amplified or attenuated by an attenuator. Magnification data items for various magnification modes are stored in a dimensional relation storing portion. A magnification selector portion reads data for setting either magnification corresponding to the present mode of operation of the scanning probe instrument specified by a mode signal from the dimensional relation storing portion and sends it to an attenuator. The attenuator amplifies or attenuates the scan signal at a magnification corresponding to the magnification data supplied via the magnification selector portion.

Abstract: To reduce temperature drift and improve measurement precision there is provided a probe scanning device having a thick tube, of which one end is supported by a case for extending in a z direction and other end is reciprocative, an inner tube passing through the inside of the thick tube, a viscous material filled in a space between the thick tube and the inner tube, a heating coil for heating the viscous material, a zooming mechanism and for selectively fixing the thick tube to the case, a voice coil motor for coarse and fine adjustment of the inner tube along the thick tube, a tip, mounted at a front end of the inner tube, with the heating coil being energized to decrease viscosity of the viscous material during coarse adjustment in order to get the tip close to a sample surface, wherein fixing means is installed for selectively fixing the thick tube and the inner tube.

Abstract: A measuring method and apparatus of a scanning probe microscope which is easy to initially set caused by exchanging a cantilever. A cantilever is effected of Z rough movement while forcibly vibrating a sample. When a contact pressure of the cantilever against the sample becomes a predetermined magnitude, the Z rough movement is ended. The forcible vibrational frequency may be a new resonant frequency caused by contacting the cantilever with the sample, or a shift resonant frequency. Then, XY scanning is effected to measure while putting the cantilever into light contact with a sample surface. It is possible to use, as an apparatus to forcibly vibrate the cantilever, a multi-layer piezoelectric element that responds to an output signal from an oscillator for outputting a signal at a predetermined frequency.

Abstract: A scanning probe instrument is offered which can easily calibrate measured values and permits accurate length measurements regardless of the magnification factor. A scan signal generator produces an X-scan signal SX that is amplified or attenuated by an attenuator and applied to a first operational amplifier. Two magnification data items CXW and CXZ for specifying the magnification of the attenuator are registered in a dimensional relation registration portion. A magnification selector portion reads data for setting either magnification corresponding to the present mode of operation of the scanning probe instrument specified by a mode signal SM from the dimensional relation registration portion and sends it to an attenuator. The attenuator amplifies or attenuates the scan signal SX at a magnification corresponding to the magnification data supplied via the magnification selector portion.

Abstract: Scanning signals SX and SY produced from a scanning signal-generating portion are directly supplied to a VCM driver amplifier without being attenuated according to the magnification factor. A magnification-setting portion sets the VCM driver amplifier at a magnification factor. A PI control signal produced from a PI control portion is directly supplied to a VCM driver amplifier without being attenuated according to the magnification factor.

Abstract: A vacuum-oriented vertical transfer system which provides super vacuum/super clean environments, and a gate valve assembly which reduces the size of electromagnet sections. The vacuum-oriented vertical transfer system includes a cylindrical partition wall, and a rod vertically moved through an open bottom of a vacuum container. The rod is floatingly supported in radial and axial directions thereof by a radial magnetic support device and an axial magnetic support device, respectively. The gate valve assembly comprises a closure member mounted for positioning adjacent to and away from a port of a container to close and open the port, respectively. A neck member is integrally connected to the closure member and is mounted for movement to position the closure member to open and close the port of the container. A radial magnet device levitates the neck member by magnetic forces in a radial direction thereof. An axial magnetic device levitates the neck member by magnetic forces in an axial direction thereof.

Abstract: An apparatus for detecting defects in a processing track on a hard disc uses an average or mean average level value as a reference value, in which an arithmetic means computes the average or mean average level value based on an average level value (Track Average Amplitude or TAA) for a plurality of tracks prior to the processing track which is stored in a memory means. The apparatus enables obtaining the reference value with less dispersion, which gives even and stable detected results of any defect in each track on the hard disc, and enables improvement in the efficiency of the throughput.

Abstract: Hard disk testing apparatus and method having a plurality of heads mounted on a carriage capable of moving in the direction of a hard disc at intervals defined by dividing the radius of the hard disc, write circuit for writing a test signal through the heads in the hard disc, read circuit for reading a signal written through the heads, and measuring function for measuring a separation between one head of the heads and another head of the heads provided adjacent to the one head based on a shift distance of the another head shifted to read a signal written by the one head. A separation of the heads is accurately measured without a measuring device, and micro adjustment of positions of the heads based on the measured separation is not required. The possibility of double testing of or failure in testing tracks on the border is eliminated, and thereby disc test is efficiently performed.

Abstract: A hard disk testing apparatus is comprised of a pair of carriages, each provided with a pair of upper and lower heads, and one of the upper and lower heads on either of the carriages is mounted on a micro adjustment carriage. With this structure, the head mounted on the fixed carriage writes a signal, and the head mounted on the carriage equipped with the micro adjustment carriage reads the signal. The structure and operation of the apparatus effectively prevent omission or duplication of testing tracks at the border between a test range of a hard disk covered by one of the pair of carriages and another test range covered by the other carriage.