Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A variable-speed passenger conveyer comprises: endless driving chains which disengage the pallets at an acceleration zone and high-speed zone; a screw shaft which has a pitch that changes step by step so as to accelerate or decelerate the palettes; high-speed driving chains which engage the palettes at the high-speed zone to transport the palettes at high speed; and a driving system.