Patents by Inventor Ryuichirou Tamochi
Ryuichirou Tamochi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230316721Abstract: Provided is a microstructure evaluation system capable of detecting, based on an image of a sample, a fluctuation caused by an imaging device. A microstructure evaluation device 10 includes: a feature data extraction unit 13 configured to extract first feature data from an image captured by an imaging device 1 while changing an observation field of view on a sample 4; and a fluctuation evaluation unit 14 configured to calculate a long-term fluctuation of the first feature data, return an observation field of view to a position before occurrence of the long-term fluctuation and re-capture to acquire a re-captured image when the long-term fluctuation exceeds a predetermined criterion, and calculate a difference between the first feature data of the captured image at the position before the occurrence of the long-term fluctuation and the first feature data of the re-captured image.Type: ApplicationFiled: May 12, 2021Publication date: October 5, 2023Inventors: Sayaka KURATA, Ryuichirou TAMOCHI
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Patent number: 7217925Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: GrantFiled: December 22, 2005Date of Patent: May 15, 2007Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Publication number: 20060102840Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: ApplicationFiled: December 22, 2005Publication date: May 18, 2006Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Patent number: 7009178Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: GrantFiled: April 11, 2005Date of Patent: March 7, 2006Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Publication number: 20050178965Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: ApplicationFiled: April 11, 2005Publication date: August 18, 2005Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Patent number: 6897445Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: GrantFiled: November 12, 2003Date of Patent: May 24, 2005Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Publication number: 20040094713Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: ApplicationFiled: November 12, 2003Publication date: May 20, 2004Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Patent number: 6713761Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: GrantFiled: May 24, 2001Date of Patent: March 30, 2004Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Publication number: 20010054692Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: ApplicationFiled: May 24, 2001Publication date: December 27, 2001Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma