Abstract: An integrated exhaust heat recovery device positioned in an exhaust gas channel includes: a positioning section that comprises a tubular section extending in a downward-flow direction of exhaust gas, and has an exhaust gas purification device positioned therein; a heat exchange section positioned on a downstream side of the positioning section and having a heat exchanger; and an exhaust gas control unit for introducing exhaust gas, which flows from the positioning section, to the heat exchange section. The heat exchanger includes: a plurality of plates positioned so as to overlap in the downward-flow direction; an intake section for causing fluid to flow into heat exchange channels inside the plurality of plates from an intake port that opens laterally; and a discharge section for causing fluid to exit from the heat exchange channels through a discharge port that opens laterally.

Abstract: An exhaust heat recovery device comprises an exhaust pipe, a shell member, a heat exchange portion, an inflow portion, a valve, a driving portion that generates a driving force for driving the valve, and a transmitting portion that transmits the driving force generated by the driving portion to the valve. The driving portion comprises an expansion portion that expands when an external electrical signal is inputted thereto, and a linearly moving portion that extends according to expansion of the expansion portion.

Abstract: A valve device opens/closes an opening that is located at an end portion of a flow path and whose shape is a point symmetrical or substantially point symmetrical planar figure. The valve device includes a lid portion closing the opening and an arm portion rotating the lid portion about an axis to open/close the opening. A straight line passing through the center of the opening and orthogonal to the opening is taken as a center line. The axis is a straight line intersecting the flow path without intersecting the center line. When closing the opening, the arm portion rotates the lid portion toward the center line, and when opening the opening, the arm portion rotates the lid portion to the opposite side of the center line.

Abstract: A valve device opens/closes an opening that is located at an end portion of a flow path and whose shape is a point symmetrical or substantially point symmetrical planar figure. The valve device includes a lid portion closing the opening and an arm portion rotating the lid portion about an axis to open/close the opening. A straight line passing through the center of the opening and orthogonal to the opening is taken as a center line. The axis is a straight line intersecting the flow path without intersecting the center line. When closing the opening, the arm portion rotates the lid portion toward the center line, and when opening the opening, the arm portion rotates the lid portion to the opposite side of the center line.

Abstract: An integrated exhaust heat recovery device positioned in an exhaust gas channel includes: a positioning section that comprises a tubular section extending in a downward-flow direction of exhaust gas, and has an exhaust gas purification device positioned therein; a heat exchange section positioned on a downstream side of the positioning section and having a heat exchanger; and an exhaust gas control unit for introducing exhaust gas, which flows from the positioning section, to the heat exchange section. The heat exchanger includes: a plurality of plates positioned so as to overlap in the downward-flow direction; an intake section for causing fluid to flow into heat exchange channels inside the plurality of plates from an intake port that opens laterally; and a discharge section for causing fluid to exit from the heat exchange channels through a discharge port that opens laterally.

Abstract: An exhaust heat recovery device comprises an exhaust pipe, a shell member, a heat exchange portion, an inflow portion, a valve, a driving portion that generates a driving force for driving the valve, and a transmitting portion that transmits the driving force generated by the driving portion to the valve. The driving portion comprises an expansion portion that expands when an external electrical signal is inputted thereto, and a linearly moving portion that extends according to expansion of the expansion portion.

Abstract: An abnormality determination system for a processing apparatus includes: a data acquiring section that acquires time-series data changing with time from a signal outputted by a sensor installed in a processing apparatus for processing a processing object; a data selecting section that selects only model data, which is useful time-series data, from the time-series data acquired by the data acquiring section; a threshold value setting section configured to calculate variable threshold value data changing with time from the model data selected by the data selecting section; and a determining section configured to determine an occurrence of an abnormality by comparing time-series data to be monitored, acquired by the data acquiring section, with the variable threshold value data. The selection of model data is performed based on an evaluation performed by an inspection device which is configured to evaluate a processing result of the processing object performed by the processing apparatus.

Abstract: An abnormality determination system for a processing apparatus includes: a data acquiring section that acquires time-series data changing with time from a signal outputted by a sensor installed in a processing apparatus for processing a processing object; a data selecting section that selects only model data, which is useful time-series data, from the time-series data acquired by the data acquiring section; a threshold value setting section configured to calculate variable threshold value data changing with time from the model data selected by the data selecting section; and a determining section configured to determine an occurrence of an abnormality by comparing time-series data to be monitored, acquired by the data acquiring section, with the variable threshold value data. The selection of model data is performed based on an evaluation performed by an inspection device which is configured to evaluate a processing result of the processing object performed by the processing apparatus.

Abstract: When a heating plate performs heat treatment on a substrate by a wireless wafer provided with a temperature detecting portion, a storing portion and a controller, the temperature of the heating plate is measured readily and accurately while suppressing lowering of a heating operation efficiency due to a measuring operation. A temperature measurement start instruction is provided to the controller of the wireless wafer at a position in a wireless wafer carrier, and thereby the wireless wafer starts temperature detection to store time-series data of the detected temperature value in the storing portion. The wireless wafer is transferred to a heating unit through a predetermined transfer path. Based on a transportation time required for placing the wireless wafer on the heating plate and the time-series data of the detected temperature value in the storing portion, the time-series data of the detected temperature value obtained after the wireless wafer is placed on the heating plate is fetched.

Abstract: When a heating plate performs heat treatment on a substrate by a wireless wafer provided with a temperature detecting portion, a storing portion and a controller, the temperature of the heating plate is measured readily and accurately while suppressing lowering of a heating operation efficiency due to a measuring operation. A temperature measurement start instruction is provided to the controller of the wireless wafer at a position in a wireless wafer carrier, and thereby the wireless wafer starts temperature detection to store time-series data of the detected temperature value in the storing portion. The wireless wafer is transferred to a heating unit through a predetermined transfer path. Based on a transportation time required for placing the wireless wafer on the heating plate and the time-series data of the detected temperature value in the storing portion, the time-series data of the detected temperature value obtained after the wireless wafer is placed on the heating plate is fetched.