Abstract: A cultivation system moves containers between a growing area and a monitoring area. The containers hold cultivation beds for cultivating plants, and the cultivation system includes: a grow light emitting unit emitting grow light for growing the cultivated plants in the containers located in the growing area; an imaging unit capturing the cultivated plants in the containers located in the monitoring area; and a control unit causing the grow light emitting unit to stop emitting the grow light when the imaging unit captures the plants.

Abstract: An irrigation device includes: a nozzle discharging liquid; a cover preventing the liquid discharged from the nozzle from splattering around the container; and a moving mechanism moving the cover between a first position and a second position. When moved to the first position, the cover covers space above the container. When moved to the second position, the cover is removed from the space above the container and the space is uncovered. The moving mechanism moves the cover (i) to the first position when the liquid is supplied to a plant, and (ii) to the second position when the supplying of the liquid to the plant ends.

Abstract: An irrigation device includes: a nozzle discharging liquid; a cover preventing the liquid discharged from the nozzle from splattering around the container; and a moving mechanism moving the cover between a first position and a second position. When moved to the first position, the cover covers space above the container. When moved to the second position, the cover is removed from the space above the container and the space is uncovered. The moving mechanism moves the cover (i) to the first position when the liquid is supplied to a plant, and (ii) to the second position when the supplying of the liquid to the plant ends.

Abstract: A cultivation system moves containers between a growing area and a monitoring area. The containers hold cultivation beds for cultivating plants, and the cultivation system includes: a grow light emitting unit emitting grow light for growing the cultivated plants in the containers located in the growing area; an imaging unit capturing the cultivated plants in the containers located in the monitoring area; and a control unit causing the grow light emitting unit to stop emitting the grow light when the imaging unit captures the plants.

Abstract: In a plasma treatment apparatus for performing plasma treatment by accommodating a substrate in a treatment chamber, a fixed guide 12 and a movable guide 13 made of a ceramic are arrayed in an X direction (in a substrate transporting direction) for guiding both side end portions of the substrate held on a ceramic-made mounting plate 10, and both end portions of the movable guide 13 are supported by supporting members. In this construction, these supporting members are fitted to fixed members 15A and 15B arranged in a Y direction with the mounting plate 10 placed therebetween, such that an interval in the Y direction is adjustable. Consequently, the ceramic-made guide member 13 can be mounted and demounted without directly bolting it, and it is possible to prevent the generation of an abnormal discharge by using as objects multiple product thin-type substrates with different widthwise dimensions.

Abstract: In a plasma treatment apparatus for performing plasma treatment by accommodating a substrate (11) in a treatment chamber (6), a fixed guide (12) and a movable guide (13) made of a ceramic are arrayed in an X direction (in a substrate transporting direction) for guiding both side end portions of the substrate held on a ceramic-made mounting plate (10), and both end portions of the movable guide (13) are supported by supporting members (18). In this construction, these supporting members (18) are fitted to fixed members (15A) and (15B) arranged in a Y direction with the mounting plate (10) placed therebetween, such that an interval in the Y direction is adjustable. Consequently, the ceramic-made guide member (13) can be mounted and demounted without directly bolting it, and it is possible to prevent the generation of an abnormal discharge by using as objects multiple product thin-type substrates (11) with different widthwise dimensions.

Abstract: A plasma-processing apparatus providing a resin mold domed enough to allow no bonding wires to be exposed is presented. The plasma-processing apparatus cleans a board including a chip mounted thereon and a disposing area for a pad formed around the chip. The apparatus includes a chamber for accommodating the board; an electrode mounted to the chamber for generating plasma in the chamber with a voltage applied thereto, a table for supporting the board in the chamber, and a masking member which is provided above the board. The masking member has an opening for exposing the chip and the disposing area to the plasma.

Abstract: A plasma-processing apparatus providing a resin mold domed enough to allow no bonding wires to be exposed is presented. The plasma-processing apparatus cleans a board including a chip mounted thereon and a disposing area for a pad formed around the chip. The apparatus includes a chamber for accommodating the board; an electrode mounted to the chamber for generating plasma in the chamber with a voltage applied thereto, a table for supporting the board in the chamber, and a masking member which is provided above the board. The masking member has an opening for exposing the chip and the disposing area to the plasma.