Abstract: A method of adjusting heat uniformity on a wafer mounting surface of a wafer mount having a ceramic base including the wafer mounting surface which can heat a wafer through energization and a cooling plate includes: a) preparing the wafer mount including the cooling plate including: a base including a flow path of a coolant; and a lid detachable from the base; b) measuring a temperature distribution with the lid being attached on the base while heating through the energization and cooling; c) detaching the lid and locally adjusting a shape of the flow path when the temperature distribution does not satisfy a predetermined criterion; and d) remeasuring the temperature distribution after adjusting the shape of the flow path, with the lid being attached on the base while heating through the energization and cooling, wherein the steps c) and d) are repeated until the remeasured temperature distribution satisfies the criterion.

Abstract: A vehicle has a bed and a tailgate openably and closably formed at the rear end of the vehicle. The exterior of the bed is surrounded by side panels. Elongated support members are provided on the inner wall of the side panel. A cover member which covers the bed is placed on the support members. The cover member has lock means for fixing the cover member to the bed. The lock means comprises a first fixation member which fixes the cover member to the bed in a disengageable manner, and a second fixation member which fixes the tailgate to the cover member in a disengageable manner.

Abstract: An attachment structure for a tonneau cover, formed in an approximately tabular shape, for a pickup truck with a bed extending from a rear end of a vehicle to a rear pillar portion, comprises a bed rail as an elongated support member on which the tonneau cover for the pickup truck is placed, the tonneau cover extending on an inner surface of a side wall of the pickup truck in the longitudinal direction of the pickup truck in such a way that the upper surface of the tonneau cover is put apart downward from the upper end of the bed of the pickup truck.

Abstract: A vehicle has a bed and a tailgate openably and closably formed at the rear end of the vehicle. The exterior of the bed is surrounded by side panels. Elongated support members are provided on the inner wall of the side panel. A cover member which covers the bed is placed on the support members. The cover member has lock means for fixing the cover member to the bed. The lock means comprises a first fixation member which fixes the cover member to the bed in a disengageable manner, and a second fixation member which fixes the tailgate to the cover member in a disengageable manner.

Abstract: An attachment structure for a tonneau cover, formed in an approximately tabular shape, for a pickup truck with a bed extending from a rear end of a vehicle to a rear pillar portion, comprises a bed rail as an elongated support member on which the tonneau cover for the pickup truck is placed, the tonneau cover extending on an inner surface of a side wall of the pickup truck in the longitudinal direction of the pickup truck in such a way that the upper surface of the tonneau cover is put apart downward from the upper end of the bed of the pickup truck.

Abstract: A magnetic drive device comprises a hollow cylindrical outer rotor, an inner rotor inserted in the outer rotor so as to proejct at least at one end thereof beyond an end of the outer rotor and supported rotatably relative to the outer rotor, two magnetic bearings arranged around the outer rotor and spaced apart axially thereof for holding the outer rotor radially thereof, a first magnetic coupling having a drive portion disposed around the outer rotor for transmitting a torque to the outer rotor, and a second magnetic coupling having a drive portion disposed around the inner rotor at a portion thereof projecting beyond the end of the outer rotor for transmitting a torque to the inner rotor.

Abstract: In a substrate processing apparatus, a substrate is processed to form a thin film thereon while it is maintained in the vertical direction, Furthermore, the rear surface of the substrate is cooled by a substrate cooling mechanism which contacts the rear surface thereof. The substrate cooling mechanism moves in a reciprocating fashion, whereas a substrate holder for holding the substrate moves both in horizontal and vertical directions.

Abstract: In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed substrate, the automatic loader has: a plurality of cassette stages for vertically moving cassettes having a plurality of substrates held horizontally and parallel to each other; a first substrate convey mechanism contacting a single door of the substrate processing apparatus and forming a common conveyance path of all substrates; a single substrate posture control stage arranged in contact with the first convey mechanism to correct a posture of the substrate to be fed in the substrate processing apparatus; second substrate convey mechanisms for forming at least one conveyance path between the plurality of cassette stages and the substrate posture control stage and exchanging and conveying the substrate; and substrate counters arranged in the respective conveyance paths of the second substrate convey mechanisms.

Abstract: An apparatus for performing continuous treatment in vacuum including an inlet chamber, a first intermediate chamber, at least one vacuum treating chamber, a second intermediate chamber and a withdrawing chamber arranged in the indicated order in a direction in which base plates are successively transferred. An opening device normally closed and opened when a base plate is transferred therethrough is mounted on a wall at the inlet of the inlet chamber, between the adjacent chambers and on a wall at the outlet side of the withdrawing chamber. A conveyor device for conveying each base plate in a horizontal direction through the opening device is mounted in each of the chambers, and an evacuating device is also mounted in each chamber. A base plate storing device for storing a plurality of base plates in a magazine is mounted in the first and second intermediate chambers. At least one vacuum treating device is mounted in the vacuum treating chamber.