Abstract: A process selection system and method enable the automatic control of the specification to equipment most suitable for each lot. Processing using this specific equipment can be performed by further selecting the most suitable equipment from equipment used for the product type. Since a plurality of equipment can be specified for each lot, the equipment can be specified from an equipment group having these plurality of equipment. The adequate number of products in process for each equipment-specific process equipment id can be calculated based on the distribution percentage ri. The equipment-specific process equipment having the maximum value of the differential Gi between the adequate number of products in process ni and the collected actual number of products in process can be determined as the equipment-specific process equipment for the lot.

Abstract: A process control device includes: a change table detection unit to determine existence of a change table corresponding to a progress file; a progress file adjustment unit to change, when the change table detection unit determines that there exists a change table, the content of the progress file based on the change table; a unit to control a transport device of an item in process based on the progress file changed by the progress file adjustment unit; and a unit to control a manufacturing device of the item based on the progress file changed by the progress file adjustment unit. The manufacturing device control unit controls the manufacturing device based on the progress file that has been changed by the progress file adjustment unit, and thus, it is possible to change the processing orders, processing conditions and the like even when individual items are in respective manufacturing steps.

Abstract: A process control device for controlling a processing device and a transport apparatus while updating process information of a lot includes: a control information update unit to update control information for controlling the processing device and the transport apparatus; a work-in-process information update unit to update the work-in-process information indicating a location of a lot; a processing device control unit to control the processing device according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information updated unit; and a transport apparatus control unit to control the transport apparatus according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information update unit.

Abstract: A semiconductor manufacturing system having a high processing efficiency and a high product output includes a processing device for simultaneously processing a prescribed number of lots for which it is reserved, and a semiconductor manufacturing system control device connected to the processing device for managing the manufacturing steps.